Title:
STACKED BODY AND METHOD FOR DETACHING STACKED BODY
Document Type and Number:
WIPO Patent Application WO/2012/056867
Kind Code:
A1
Abstract:
This stacked body is provided with: a support body that is transparent to light; a supported substrate that is supported by the support body; a bonding layer that is provided to the surface of the supported body that is on the side supported by the support body; and a detachment layer comprising an inorganic material and provided between the support body and the supported substrate. The detachment layer is formed in a manner so as to transform by means of absorbing light radiated through the support body, and the surface of the detachment layer on the side facing the bonding layer is flat.
Inventors:
INAO YOSHIHIRO
FUJII YASUSHI
MATSUSHITA ATSUSHI
TAMURA KOKI
KUBO ATSUSHI
FUJII YASUSHI
MATSUSHITA ATSUSHI
TAMURA KOKI
KUBO ATSUSHI
Application Number:
PCT/JP2011/073245
Publication Date:
May 03, 2012
Filing Date:
October 07, 2011
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD (JP)
INAO YOSHIHIRO
FUJII YASUSHI
MATSUSHITA ATSUSHI
TAMURA KOKI
KUBO ATSUSHI
INAO YOSHIHIRO
FUJII YASUSHI
MATSUSHITA ATSUSHI
TAMURA KOKI
KUBO ATSUSHI
International Classes:
H01L21/02; H01L21/683
Foreign References:
| JP2005183689A | 2005-07-07 | |||
| JP2005197673A | 2005-07-21 | |||
| JPH10125929A | 1998-05-15 | |||
| JP2004064040A | 2004-02-26 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
Patent business corporation Hara [Kenzo] international patent firm (JP)
Patent business corporation Hara [Kenzo] international patent firm (JP)
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Claims: