SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR OPERATING THE SAME

Title:

SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR OPERATING THE SAME

Document Type and Number:

WIPO Patent Application WO/2020/151904

Kind Code:

A3

Abstract:

A system comprising a multi-beam particle microscope for imaging a 3D sample layer by layer and a computer system with a multi-tier architecture is disclosed. The multi-tier architecture allows for an optimized image processing by gradually reducing the amount of parallel processing speed when data exchange between different processing systems and/or of data originating from different detection channels takes place. Furthermore, a method for imaging a 3D sample layer by layer is disclosed, as well as a computer program product with a program code for carrying out the disclosed method.

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Inventors:

ZEIDLER DIRK (DE)
KÄMMER NICO (DE)
CRÜGER CHRISTIAN (DE)

Application Number:

PCT/EP2020/000012

Publication Date:

September 03, 2020

Filing Date:

January 14, 2020

Export Citation:

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Assignee:

CARL ZEISS MULTISEM GMBH (DE)

International Classes:

H01J37/22; H01J37/28

Domestic Patent References:

WO2018145983A1

2018-08-16

Foreign References:

US20130248731A1	2013-09-26
US20120061565A1	2012-03-15
JP2014235883A	2014-12-15
US20180053627A1	2018-02-22

Attorney, Agent or Firm:

TESCH-BIEDERMANN, Carmen (DE)

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