TEMPERATURE ADJUSTING DEVICE FOR STONE SURFACE PLATE, AND INSPECTION DEVICE PROVIDED WITH SAME

Title:

TEMPERATURE ADJUSTING DEVICE FOR STONE SURFACE PLATE, AND INSPECTION DEVICE PROVIDED WITH SAME

Document Type and Number:

WIPO Patent Application WO/2019/194139

Kind Code:

A1

Abstract:

The present invention comprises: a lower-surface temperature adjustment panel which is disposed on an installation floor surface; and a temperature control which controls the temperature of the lower-surface temperature adjustment panel. The temperature control unit controls the temperature of the lower-surface temperature adjustment panel such that the temperature difference between the upper surface of a stone surface plate and the surface of the lower-surface temperature adjustment panel reaches a set value.

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Inventors:

YONEZAWA MAKOTO (JP)

Application Number:

PCT/JP2019/014502

Publication Date:

October 10, 2019

Filing Date:

April 01, 2019

Export Citation:

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Assignee:

V TECH CO LTD (JP)

International Classes:

G01N21/956

Foreign References:

JPS62218837A	1987-09-26
JPH09126703A	1997-05-16
JP2008010633A	2008-01-17
DE102010056039A1	2012-06-21