Title:
TEMPERATURE SENSOR, HEAT TREATMENT DEVICE, AND METHOD FOR MANUFACTURING TEMPERATURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2024/029218
Kind Code:
A1
Abstract:
Provided is a temperature sensor capable of performing high-speed measurement in an environment in which a clean environment is required. In a temperature sensor 100, a light absorbing layer 110 absorbs light from a heating light source 310. A waveguide layer 120 has a laminated structure together with the light absorbing layer 110, and includes a waveguide 122 having at least one periodic structure 124 in a wave-guiding direction. A measurement light source 210 and an optical measuring device 220 measure a shift in a Bragg wavelength λB of the waveguide 122 of the temperature sensor 100.
Inventors:
AKAI SHINGO (JP)
TSURUOKA KAZUYUKI (JP)
TSURUOKA KAZUYUKI (JP)
Application Number:
PCT/JP2023/022860
Publication Date:
February 08, 2024
Filing Date:
June 21, 2023
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G01K11/3206
Foreign References:
| JP2006029878A | 2006-02-02 | |||
| JP2014206422A | 2014-10-30 | |||
| JP2002208567A | 2002-07-26 |
Attorney, Agent or Firm:
KIMURA Masayoshi (JP)
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