Title:
TRANSFER DEVICE, POLISHING EQUIPMENT, AND TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2023/162924
Kind Code:
A1
Abstract:
This transfer device moves, to a planetary device-type polishing part that has an internal gear and a sun gear that rotate on a support surface of a platen and that polishes the surface of a substrate facing in the thickness direction, a carrier in which are formed a plurality of teeth that are flat, provided on the outer peripheral edge, and are able to mesh with the internal gear and the sun gear, and a through-hole accommodating the substrate, wherein the transfer device comprises a transfer part for transferring the carrier, an image-capturing part for acquiring an image of at least some of the plurality of teeth of the internal gear and at least some of the plurality of teeth of the sun gear, and a control unit for controlling the transfer unit.
More Like This:
| JPS5548948 | ONEETOUCH COLLET |
| JP5168594 | Board transfer equipment |
| JP4138590 | Pickup unit and transport device |
Inventors:
SAITO MITSUGI (JP)
KANAI RYUICHI (JP)
MIURA MASAFUMI (JP)
HIROSHIMA TOSHIHIRO (JP)
MORITA MASARU (JP)
ESAKI KEISUKE (JP)
KANAI RYUICHI (JP)
MIURA MASAFUMI (JP)
HIROSHIMA TOSHIHIRO (JP)
MORITA MASARU (JP)
ESAKI KEISUKE (JP)
Application Number:
PCT/JP2023/005980
Publication Date:
August 31, 2023
Filing Date:
February 20, 2023
Export Citation:
Assignee:
MITSUBISHI MAT TECHNO CORPORATION (JP)
SUMCO CORP (JP)
SUMCO CORP (JP)
International Classes:
H01L21/677; B24B37/08; B24B37/28; B24B49/12; H01L21/304; H01L21/463
Foreign References:
| JP2000326222A | 2000-11-28 | |||
| JPS61191847U | 1986-11-29 | |||
| JP2003175456A | 2003-06-24 | |||
| JPH04206931A | 1992-07-28 | |||
| JPH05212670A | 1993-08-24 | |||
| JP2017537479A | 2017-12-14 | |||
| JP2005243996A | 2005-09-08 |
Attorney, Agent or Firm:
MATSUNUMA Yasushi et al. (JP)
Download PDF: