Title:
TUNING-FORK VIBRATORY PIECE, PIEZOELECTRIC VIBRATOR, ANGULAR VELOCITY SENSOR, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2005/074130
Kind Code:
A1
Abstract:
A tuning-fork vibratory piece having a favorable frequency temperature characteristic over a wide temperature range, that is, a turning-fork vibratory piece having a vibration frequency slightly varying over a wide temperature range. [MEANS FOR SOLVING PROBLEMS] A tuning-fork vibratory piece is made of a piezoelectric material of GaPO4 and has a pair of arm portions. The tuning-fork vibratory piece is characterized in that when the crystal axes of the GaPO4 are the X-axis, Y-axis, and Z-axis, new Y’-axis and new Z’-axis are defined by rotating the Y-axis and Z-axis about the X-axis clockwise when viewed in the +X direction by an angle of from 7.7° or more to 11.3° or less, and the thickness direction of the arm portions is made the Z’-axis, the width direction of the arm portions is made the X-axis, and the length direction of the arm portions is made the Y’-axis.
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Inventors:
EGUCHI MAKOTO
KANNA SHIGEO
TANAKA MASAKO
KANNA SHIGEO
TANAKA MASAKO
Application Number:
PCT/JP2005/001734
Publication Date:
August 11, 2005
Filing Date:
January 31, 2005
Export Citation:
Assignee:
SEIKO EPSON CORP (JP)
International Classes:
G01C19/5607; H01L41/09; H01L41/18; H03H9/02; H03H9/10; H03H9/13; G01C19/56; H03H9/15; H03H9/17; H03H9/21; (IPC1-7): H03H9/17; G01P9/04; H01L41/09; H01L41/18; H03H9/02
Foreign References:
| JPS532097A | 1978-01-10 |
Other References:
DELMAS L. ET AL: "proceedings of the 2003 ieee international frequency control symposium and pda exhibition jointly with the 17th european fequency and time forum", PROCEEDINGS OF THE 2003 IEEE INTERNATIONAL, 4 May 2003 (2003-05-04), pages 663 - 667, XP010690353
Attorney, Agent or Firm:
Kamiyanagi, Masataka c/o Intellectual, Property Division (SEIKO EPSON CORPORATION 3-5,, Owa 3-Chome, Suwa-Sh, Nagano 02, JP)
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