Title:
TWO-DIMENSIONAL ACOUSTIC VECTOR SENSOR
Document Type and Number:
WIPO Patent Application WO/2022/257660
Kind Code:
A1
Abstract:
Provided in the embodiments of the present application is a two-dimensional acoustic vector sensor, comprising a wafer, a first pickup structure, and a second pickup structure, wherein the first pickup structure and the second pickup structure are respectively arranged on two sides of the wafer in the thickness direction thereof; the first pickup structure extends in a first direction, and the second pickup structure extends in a second direction, the first direction being orthogonal to the second direction; and the first pickup structure comprises at least two thermal resistance wires arranged in parallel, and the second pickup structure comprises at least two thermal resistance wires arranged in parallel. The two-dimensional acoustic vector sensor provided in the embodiments of the present application has a good two-dimensional pickup effect.
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Inventors:
LI YINGMING (CN)
ZHU MENGYAO (CN)
YU YUANYUAN (CN)
LU MINGHUI (CN)
XU XIANGYUAN (CN)
ZHU MENGYAO (CN)
YU YUANYUAN (CN)
LU MINGHUI (CN)
XU XIANGYUAN (CN)
Application Number:
PCT/CN2022/091205
Publication Date:
December 15, 2022
Filing Date:
May 06, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
UNIV NANJING (CN)
UNIV NANJING (CN)
International Classes:
H04R1/08; G01H5/00
Foreign References:
| CN109916499A | 2019-06-21 | |||
| CN111829646A | 2020-10-27 | |||
| CN111220257A | 2020-06-02 | |||
| CN107917750A | 2018-04-17 | |||
| JP2009250928A | 2009-10-29 |
Attorney, Agent or Firm:
LEADER PATENT & TRADEMARK FIRM (CN)
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