Title:
ULTRASONIC HORN
Document Type and Number:
WIPO Patent Application WO/2017/094558
Kind Code:
A1
Abstract:
An ultrasonic horn is provided with: a vibration generating unit constituted so as to generate longitudinal vibration having a frequency in the ultrasonic band on the basis of a signal having a frequency in the ultrasonic band input from an oscillator; a vibration amplifying unit constituted so as to amplify while transmitting the longitudinal vibration from the vibration generating unit; and a longitudinal-torsional vibration conversion slit unit having slits formed in a channel shape on the surface of the vibration amplifying unit and constituted so as to convert the longitudinal vibration into torsional vibration. The vibration amplifying unit has a polygonal shape in a plane view, and has a plurality of surfaces provided with slits along with a surface not provided with slits.
Inventors:
MIURA HIKARU (JP)
ASAMI TAKUYA (JP)
TOGASHI YASUMOTO (JP)
AOYAGI NOBUYUKI (JP)
ASAMI TAKUYA (JP)
TOGASHI YASUMOTO (JP)
AOYAGI NOBUYUKI (JP)
Application Number:
PCT/JP2016/084547
Publication Date:
June 08, 2017
Filing Date:
November 22, 2016
Export Citation:
Assignee:
SHINKAWA KK (JP)
International Classes:
B06B1/02; H01L21/607
Foreign References:
| JPH08294673A | 1996-11-12 | |||
| JP2010149017A | 2010-07-08 | |||
| JPH06881A | 1994-01-11 | |||
| JP2007129181A | 2007-05-24 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
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