Title:
VACUUM PUMP AND VACUUM PUMP CONSTITUENT COMPONENT
Document Type and Number:
WIPO Patent Application WO/2020/195943
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump having a large thermal resistance between a heater and a cooling water pipe, and having a small number of components. [Solution] A vacuum pump provided with a casing main body 14 having an intake part 12 and an exhaust part 13 for a gas, a turbomolecular pump mechanism part 17 in which stator blades 19 and rotor blades 20 are formed, and a motor 16 for causing the rotor blades 20 to rotate, wherein the casing main body 14 has a base spacer 42 capable of conducting heat between an integrally formed heating spacer section 46 and cooling spacer section 47, and the base spacer 42 is provided with a boundary section 52 formed such that the cross section has a narrow neck shape between the heating spacer section 46 and the cooling spacer section 47.
Inventors:
YOSHIHARA NAHOKO (JP)
SAKAGUCHI YOSHIYUKI (JP)
TATENO YASUSHI (JP)
OGAWA YOHEI (JP)
SAKAGUCHI YOSHIYUKI (JP)
TATENO YASUSHI (JP)
OGAWA YOHEI (JP)
Application Number:
PCT/JP2020/011072
Publication Date:
October 01, 2020
Filing Date:
March 13, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04; F04D29/52; F04D29/58
Foreign References:
| JP2015229949A | 2015-12-21 | |||
| JP2012017672A | 2012-01-26 | |||
| JP2015190404A | 2015-11-02 |
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