VACUUM PUMP AND CONTROL DEVICE FOR VACUUM PUMP

WIPO Patent Application WO/2020/195944

A1

[Problem] To provide a vacuum pump and a control device for the vacuum pump in which a structure resistant to penetration of water droplets is implemented at low cost without using a sealing member, and which are structured to enable easy separation of a pump body and a control device and easy maintenance. [Solution] Droplets of water leaked from the periphery or the like of a base part 129 penetrate a gap 220. In particular, droplets of water are more likely to penetrate when a lid 219 is removed. In this case, droplets of water may flow to a recessed part 200b. However, because a hollow plate-like part 221a is sealed and fixed to the recessed part 200b in a metal surface-to-surface manner, the droplets of water do not penetrate inside a control device 200. In addition, because a tubular member 221 is disposed penetrating through the gap 220 and is formed with a height greater than the thickness of the gap 220, droplets of water spilled from the gap 220 do not penetrate from the inside of the tubular member 221. Furthermore, even when droplets of water fall on the top surface of a plate 150, because the tubular member 221 protrudes higher than the top surface of the plate 150, droplets of water are unlikely to penetrate over the tubular member 221.

JPH05133388	DRY VACUUM PUMP
JP6583122	Monitoring device and vacuum pump
WO/2023/100813	VACUUM PUMP

SAEGUSA KENGO (JP)

PCT/JP2020/011073

October 01, 2020

March 13, 2020

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EDWARDS JAPAN LTD (JP)

F04D19/04

WO2012053270A1

2012-04-26

JP2013100760A	2013-05-23
JP2015048734A	2015-03-16
JP2018066368A	2018-04-26
JP2017002729A	2017-01-05
JP2006250033A	2006-09-21
JP2018115631A	2018-07-26

See also references of EP 3951184A4

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