Title:
VACUUM PUMP AND ROTOR BLADE FOR VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2022/030374
Kind Code:
A1
Abstract:
Provided are a vacuum pump and a rotor blade for a vacuum pump by which it is possible to effectively mitigate the accumulation of reaction products. This vacuum pump comprises: a rotary shaft (113) that is maintained in a rotatable state; a drive mechanism for the rotary shaft (113); a first rotor blade (201) made of a first material; a second rotor blade (202) that is made of a second material with a higher resistance to heat than the first material, and that is disposed downstream of the first rotor blade (201); and a casing (204) that accommodates therein the rotary shaft (113), the first rotor blade (201), and the second rotor blade (202). The second rotor blade (202) is disposed on the first rotor blade (201) with a heat-insulating unit (203) therebetween.
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Inventors:
KABASAWA TAKASHI (JP)
SAEGUSA KENGO (JP)
SAEGUSA KENGO (JP)
Application Number:
PCT/JP2021/028255
Publication Date:
February 10, 2022
Filing Date:
July 30, 2021
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2020120955A1 | 2020-06-18 | |||
| WO2008062598A1 | 2008-05-29 |
Foreign References:
| JP2003269367A | 2003-09-25 | |||
| JP2017106365A | 2017-06-15 | |||
| JP2007071139A | 2007-03-22 |
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