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Title:
X-RAY INSPECTION METHOD AND X-RAY INSPECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/074030
Kind Code:
A1
Abstract:
An X-ray inspection apparatus (100) is provided with: an X-ray source (10); an X-ray detector (23); an X-ray detector drive section (22); an image acquisition control mechanism (30) which controls drive of the X-ray detector (23) performed by means of the X-ray detector drive section (22) and acquisition of image data from the X-ray detector (23); a mechanism (20) for driving a subject to be inspected, which moves a subject to be inspected (1); an X-ray source control mechanism (60); and a calculating section (70).  The X-ray source control mechanism (60) makes the X-ray source (10) output X-rays, based on the instruction given from the calculating section (70).  An image acquisition control mechanism (30) moves the X-ray detector (23) to a plurality of image pickup positions arranged in the Y direction, based on the instruction given from the calculating section (70).  Furthermore, the mechanism (20) for driving a subject to be inspected moves the subject to be inspected (1) in the Y direction based on the instruction given from the calculating section (70) so that the X-ray detector (23) can detect, at each image pickup position, the X-ray that has passed through the subject to be inspected (1).

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Inventors:
MASUDA MASAYUKI (JP)
SUGITA SHINJI (JP)
KATO NORIYUKI (JP)
MATSUNAMI TSUYOSHI (JP)
Application Number:
PCT/JP2009/071242
Publication Date:
July 01, 2010
Filing Date:
December 21, 2009
Export Citation:
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Assignee:
OMRON TATEISI ELECTRONICS CO (JP)
MASUDA MASAYUKI (JP)
SUGITA SHINJI (JP)
KATO NORIYUKI (JP)
MATSUNAMI TSUYOSHI (JP)
International Classes:
G01N23/04
Domestic Patent References:
WO2007051587A22007-05-10
Foreign References:
JP2002267622A2002-09-18
JPH06503877A1994-04-28
US6628745B12003-09-30
JP2007513725A2007-05-31
JP2005121633A2005-05-12
JP2004108990A2004-04-08
JPH10295683A1998-11-10
JP2003344316A2003-12-03
JP2006162335A2006-06-22
Other References:
See also references of EP 2378279A4
Attorney, Agent or Firm:
FUKAMI, Hisao et al. (JP)
Hisao Fukami (JP)
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