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WO/2001/079694A1 |
An electro-desorption compression system (10, 100, 200, 300, 400, 500, 600) comprises an enclosure (30) which includes a sorbent positioned between first and second spaced-apart conductors (14, 14', 16, 16'), a sorbate capable of forming...
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WO/2001/079695A1 |
The invention relates to an oscillating piston pump (1), in particular to an oscillating piston vacuum pump. The invention aims to create a range of pumps of this type comprising members which exhibit a different final pressure behaviour...
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WO/2001/069144A2 |
Apparatus and process for producing hydrogen gas at a desired pressure comprising feeding a hydrogen gas at a first temperature and first pressure from a hydrogen source to heat transfer means comprising cooling means and heating means; ...
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WO/2001/069645A1 |
A spatter ion pump allowing a pump structure to be simplified with a reduced weight, a magnetic field near a center shaft to be reduced to zero in both radial and axial directions, and a pump attainable pressure to be increased, characte...
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WO/2001/046587A1 |
A plurality of compression paths establishing communication between a suction chamber and a discharge chamber are arranged in parallel. Each compression path is internally provided with a plurality of compression chambers, and fluid suck...
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WO/2001/046592A1 |
The invention relates to a dry compressing vacuum pump (1) having a continuous or graduated inner compression and comprising a gas ballast device (8) having an isolating valve (11); the gas ballast device (8) also comprises a non-return ...
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WO/2001/046586A1 |
A two-stage compressor, comprising a first bore in charge of primary compression and a second bore in charge of second compression, wherein a first piston is stored in the first bore and a second piston is stored in the second bore, a fi...
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WO/2001/038742A1 |
The invention relates to a vacuum pump (1, 30) which comprises an inlet (5) and an outlet (6), which are equipped with connecting devices (7, 8) for connecting lines (23). The aim of the invention is to design the connection dimensions o...
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WO/2001/014744A1 |
The invention relates to a membrane pump (104) comprising a working membrane (1) that delimits a delivery chamber (2), and comprising an additional membrane (3) that is arranged on the side of the working membrane (1) facing away from th...
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WO/2001/006123A1 |
The invention relates to a method and compressor module for compressing a gas stream of entry temperature t¿1? with the aid of hydraulically driven piston compressors in two compression stages of an entry pressure p¿1? from an intermed...
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WO/2000/077398A1 |
A cryopump in which the surface area of the condensing or adsorbing panels is increased without materially increasing the dimensions by applying a porous or roughened layer on the surface of the panels. The porous layer on the baffle may...
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WO/2000/075512A1 |
The invention relates to a pump cylinder in which a pump plunger is located which divides the cylinder into a front and a rear part. In the front part, said pump cylinder has a connection for sucking in the medium to be conveyed. The rea...
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WO/2000/070222A1 |
The invention relates to a piston vacuum pump (1), comprising a housing (13), with cylinders arranged therein. The invention also comprises pistons in the cylinders and a common crankshaft (11) for the pistons. In order to achieve a simp...
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WO/2000/063557A1 |
The invention relates to piston vacuum pump with a gas inlet, a gas outlet, at least one piston (2), at least one cylinder (3), a pump chamber (5) that is defined by said piston (2) and said cylinder (3), with a gas inlet, a gas inlet va...
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WO/2000/061437A1 |
A vacuum packaging apparatus includes a novel vacuum sensor system (58) having first (90) and second (92) sensors in communication with a control circuit (54). The sensors are provided to detect first and second preset vacuum levels as a...
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WO/2000/061832A1 |
A method is described for increasing the yield in processes of deposition of thin layers on substrates by contacting activated getter devices with the atmosphere of process chambers when no substrates are processed and when the pressure ...
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WO/2000/045085A1 |
A bottom entry pumping system for liquids, particularly cryogenic liquids, is described which includes a container with an outer wall, which may be concrete and/or metal, and an optional inner metal liner. A line is provided for transpor...
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WO/2000/040910A1 |
The present invention is related to a system for controlling the pressure in a drying apparatus. A control valve (7) located between the vacuum pump (5) and the condenser (2) is employed to regulate the pressure in the vacuum chamber (1).
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WO/2000/034655A1 |
A hydraulic compressor arrangement includes hydraulic rams A and B with associated non-return valves (13 and 16). A hydraulic pump (7), typically electrically operated, provides a pressurised fluid source to operate rams A or B to allow ...
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WO/2000/034656A1 |
A reciprocating compressor capable of producing a steady-state, continuous, non-pulsing outflow at volumes less than 25 gallons per hour. The compressor utilizes at least two pistons driven in a near axial manner with any lateral forces ...
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WO/2000/028212A1 |
The invention relates to a method for conveying damp gases by means of a conveyor device (1) and also relates to a conveyor device (1) for carrying out said method. The conveyor device (1) has at least one feed pump (2) with an oscillati...
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WO/2000/023713A1 |
A temperature-responsive, mobile shielding device (10) is located between a getter pump (GP) and a turbo-pump (TMP) being in line to each other, capable of providing a complete shielding to the radiating heat transfer from the getter pum...
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WO/2000/002594A1 |
The invention relates to a vapor sterilization device having a sterilization chamber and a vacuum pump attached thereto. Conventional vapor sterilization devices, so-called autoclaves, normally have an additional outlet and an associated...
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WO/2000/000741A1 |
A plasma pumping cell and method for pumping ions from a first region containing a plasma to a second region when the plasma pumping cell is interposed between the first and second regions, the plasma pumping cell including: a partition ...
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WO/1999/064797A1 |
A pulse pipe refrigerating machine capable of keeping a cooling temperature without using a heater, wherein a gas with a liquefied temperature within the service temperature range of the pulse pipe refrigerating machine is used as a work...
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WO/1999/060272A1 |
A device and method for evacuation capable of evacuating, for example, a vacuum chamber (process chamber) of a semiconductor manufacturing device, comprising the vacuum chamber (10), an exhaust pipe (34) for joining the vacuum chamber (1...
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WO/1999/041501A1 |
The invention concerns a vacuum pump comprising two cylinders (1, 2) wherein the respective pistons (3, 4) define respective volumes (V1, V2) which increase during the suction phase and decrease during the discharge phase. The invention ...
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WO/1999/037918A1 |
A filter standpipe is mounted within a relief conduit of a cryopump. The relief conduit is joined to an exhaust conduit, and the exhaust conduit is joined to a housing which defines a vacuum chamber. The relief conduit and exhaust condui...
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WO/1999/037919A1 |
A trap device capable of increasing a trap efficiency while fulfilling a conductance allowed by a vacuum chamber in a film forming treatment, increasing the reliability of operation accordingly by increasing the service life of a vacuum ...
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WO/1999/024714A1 |
This invention relates to a medium and high pressure liquid natural gas fuel system for internal combustion engines and for other cryogenic systems. A cryogenic pump comprising: (a) a vessel for containing compressed gas and liquid; (b) ...
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WO/1999/011931A1 |
The cryopanel of a cryopump can be preferentially defrosted to remove an acid-forming or toxic gas while leaving a second gas substantially condensed upon the cryopanel thereby limiting interaction between the vapor phases of the two gas...
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WO/1999/009317A1 |
A cold trap (20) includes a fluid conduit (38) having a fluid flow path therethrough, a length along the fluid flow path and a width transverse to the fluid flow path. The width of the fluid conduit is greater than the length. A gate val...
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WO/1999/006699A1 |
The invention relates to a method for evacuating a wet or liquid conveying medium from the treatment chamber (2) of a treatment device (1) by means of a conveying device (3) with a single- or multi-stage suction pump (4). Said conveying ...
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WO/1999/004325A1 |
A pressure for a chamber is regulated by controlling either the exhaust pressure at the exhaust side of a first vacuum pump or the internal pressure at a compression stage of the first vacuum pump, where the first vacuum pump is directly...
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WO/1998/058173A1 |
A getter pump, especially suitable for the use upstream, in proximity and coaxially with respect to a turbomolecular pump, comprising inside a cylindrical cartridge (10) a getter device (20) formed of a continuous coil-shaped metal wire ...
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WO/1998/048168A2 |
A wafer processing system (12) including a processing chamber (18), a low pressure pump (22) coupled to the processing chamber (18) for pumping noble and non-noble gases, a valve mechanism (52) coupling a source of noble gas (54) to the ...
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WO/1998/048170A1 |
A vacuum pump is provided with at least one cylinder having a cylinder liner (22) and a piston (35) mounted for reciprocating movement within the cylinder liner. The piston is connected to a crankshaft (54) for reciprocating the piston a...
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WO/1998/040629A1 |
A vacuum pumping apparatus which supplies water into a reservoir at high speed, and has a stable and steady water storage capacity and a high electric power saving efficiency. The apparatus essentially comprises vacuum control means (4) ...
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WO/1998/039570A1 |
The invention relates to a vacuum pump, comprising at least one pump chamber (7, 8, 23 to 26) and at least one chamber (3, 5, 27) adjoining said pump chamber. The vacuum pump is fitted with a gas ballast device in order to avoid damage b...
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WO/1998/037325A1 |
Getter pump with one-piece supporting framework of a plurality of elements of non-evaporable getter materials in the form of rectangular plates (10), the ends of which are housed in a series of parallel slits (4, 4a) provided on the oppo...
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WO/1998/034029A1 |
A cryopump includes a two-stage refrigerator, a primary pumping surface, and a radiation shield. The radiation shield is in thermal contact with the first stage of the refrigerator. The primary pumping surface is surrounded by the radiat...
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WO/1998/016739A2 |
A fluid displacement system comprising a pressure vessel (2), an expansion vessel (4), first and second tubes (6, 8) being each in flow communication with the two vessels, fluid contained within the system, and an energy source (30) of g...
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WO/1998/009080A1 |
The invention relates to a piston vacuum pump with at least one cylinder (2) and a piston (3) located therein,a gas inlet (7, 31) and a discharge valve (7, 31) located on the face. To improve particulate compatibility the entire face of ...
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WO/1998/006943A1 |
This invention concerns a cryopump (1) comprising pump sufaces (8, 9, 12, 13) which are held at different temperatures during operation and are located in a housing (2) with a flange (4) for connecting the pump (1) to a recipient (25). T...
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WO/1998/005869A1 |
A vacuum pumping apparatus which can stably and surely store water in a water reservoir and is highly effective in saving of electric power. The vacuum pumping apparatus essentially comprises a Geissler tube (31) serving as a vacuum indi...
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WO/1997/049109A1 |
The invention discloses a pumping device by non-vaporisable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterised in that it comprises a thin layer of non-vaporisa...
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WO/1997/039242A1 |
A cryopump having a cryopump chamber (12) includes a purge gas valve (38) coupled to the cryopump chamber for supplying a first quantity of warm gas to the cryopump chamber in order to purge the cryopump chamber during regeneration. A ro...
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WO/1997/035652A1 |
A combination cryopump/getter pump (50) including a cryopump section (52) having a cryopump inlet (76), a getter pump section (54) having a getter pump inlet (86), and a mechanism (60) for coupling the cryopump section (52) and the gette...
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WO/1997/035111A1 |
A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator ...
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WO/1997/033671A1 |
A Group I gas cryopumping system includes a compressor throttle cycle refrigerator (10) using mixed refrigerants. Cold refrigerant flows through a cryopumping surface (44) located in a vacuum chamber, whereon vapor freezes. The refrigera...
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