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JP6659930B2 |
A cryopump comprises a refrigerator, a condensing array cooled by the refrigerator, a radiation shield surrounding the condensing array and cooled by the refrigerator. The radiation shield has a frontal opening covered by a frontal array...
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JP6658207B2 |
To provide a heat transition flow pump suitable for use under a low pressure environment.A heat transition flow pump 14 has: a housing 18; a quartz fiber filter 16 that is configured to divide the housing 18 into a first chamber 20 and a...
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JP6658239B2 |
To provide a small-sized heat transition flow pump with a large flow rate.A heat transition flow pump 10 has a cooler 14 and a heater 16 arranged oppositely, and further has a porous sheet 12 arranged between the cooler 14 and the heater...
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JP2020031160A |
To reduce the effect of cooling of a superconducting magnet by the high magnetic field generated by the superconducting magnet.A superconducting magnet cooling device 100 includes a pulse tube refrigerator 10 including a superconducting ...
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JP6643295B2 |
Compressor installation with a drying device for compressed gas, with the compressor installation (1) being provided with a compressor element (2a and/or 2b) with an outlet (4) for compressed gas to which a first end of a pressure line (...
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JP6639129B2 |
According to the present invention, a cryo-trap is installed inside s case connected to a chamber which is a space to be separated while enabling a low-temperature panel cooled by a mechanical cooler to be spaced from a wall of the case....
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JP6642033B2 |
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JP2020502410A |
The present invention relates to a vacuum pump system including a main vacuum pump (10) connected to a vacuum chamber (14). An auxiliary pump (12) is connected to the outlet of the main vacuum pump (10). Further, a closed gas supply devi...
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JP2020501079A |
The vacuum pump system (10) used in the semiconductor processing assembly includes a first pump (12) having a first inlet (14) and a first outlet (16). The first inlet (14) is fluidly connected to the first common pump line (18). The fir...
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JP2020007986A |
To provide the redundancy to a cryopump system.A cryopump system 10 comprises: at least one cryopump 12, each cryopump 12 having a cryo-panel 16 and a refrigeration machine 18 for cooling the cryo-panel 16 using the adiabatic expansion o...
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JPWO2018181975A1 |
In the reciprocating booster compressor, the inside of the crankcase accommodating the crank mechanism is divided into a first space and a second space by a partition wall. At least one of the first space and the second space is pressuri...
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JP6629074B2 |
A cryopump includes a second cryopanel unit which is thermally connected to a second cooling stage of a cryocooler, a radiation shield which includes a shield main opening, a shield side opening, and a shield bottom opening, and a cryopu...
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JP6615132B2 |
A vacuum pump system for evacuating a chamber, in particular a lock or a process chamber, is provided that includes a main vacuum pump preferably configured as a screw pump. An inlet of the main vacuum pump is connected with the chamber ...
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JP6615663B2 |
A cryopumped gas amount estimation device includes: an ultimate pressure determination unit which determines an ultimate pressure of a cryopump vacuum vessel, based on a vacuum measurement signal representing the degree of vacuum in the ...
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JP6616611B2 |
The present invention provides an exhausting system capable of preventing gas condensation and early overheat in a vacuum pump without causing an increase in the costs of the entire exhausting system and is suitable for relaxing the oper...
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JP6616051B2 |
A vacuum generation device according to one aspect of the present invention is provided with a case, a vacuum pump, and a storage battery. The housing has: a top surface section having a handle part and a pipping terminal connectable to ...
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JP2019203508A |
To shorten a regeneration time of a cryopump.A cryopump system comprises a cryopump 10, and a regeneration control unit 102 that controls the cryopump 10 according to a regeneration sequence including a discharge process that discharges ...
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JP2019203201A |
To improve performance of a prior-art getter pump system by imparting higher overall capacity and/or pumping speed.There is provided a getter pump system especially useful for a linear accelerator, to put it concretely, for a high capaci...
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JP6610461B2 |
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JP2019196751A |
To enhance use efficiency of light in a pump utilizing absorption.A pump 100 comprises: a porous body 10 that partitions a first space and a second space and has pores whose pore diameter is 10 times or less of the mean free path of inte...
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JP6594638B2 |
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JP6594959B2 |
Pulse tube coolers and Gifford-McMahon coolers are used to cool nuclear spin tomographs and cryopumps. To supply cooled working gas, gas compressors and in particular helium compressors are used with rotational or rotary valves. The rate...
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JP2019528395A |
The present invention relates to a chiller for creating a vacuum, particularly a cryopump, comprising a compressor (10) for compressing a refrigerant substantially containing helium and oil. Along with the compressor, oil separators (20,...
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JP2019173613A |
To provide an evacuation device having a good exhaust property of water molecules.An evacuation device 1 comprises a moisture absorption chamber 3 arranged between a vacuum chamber 2 and a vacuum pump 4, and a gate valve 8 arranged betwe...
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JP2019173756A |
To improve energy saving performance of a cryopump system.In a cryopump system 100, a cryopump 10 comprises: a refrigerator 12 comprising a low-temperature cooling stage and a high-temperature cooling stage; a low-temperature cryopanel t...
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JP6578593B2 |
To provide a cryopump which lengthens an operation time.A cryopump 100 which condenses gas and discharges the gas has such a structure that a core rod 130 as a member which is cooled to a very low temperature in order to condense gas is ...
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JP6572340B2 |
A pump-storage device includes a tank, a treatment container, and a vacuum pump. The treatment container includes a first chamber in communication with an inlet. The first chamber includes a bottom wall having a first valve intercommunic...
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JP2019143537A |
To inhibit dew condensation occurring in a cryopump or inhibit dropping of dew condensation water.A cryopump 10 includes: a cryopump housing 70; and a water absorption layer 80 installed at the outer side of the cryopump housing 70. The ...
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JP6562503B2 |
According to the present invention, a cryotrap is installed as a low temperature panel cooled by a mechanical refrigerator in a case connected to a chamber which is a degasification space is spaced from a case wall. Moreover, the cryotra...
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JP6552335B2 |
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JP6553844B2 |
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JP6549418B2 |
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JP6546247B2 |
To provide an improved vacuum seal enabling reliable sealing even in a case of extremely low vacuum pressure, especially even in a case of pressure of less than 10mba.A vacuum seal is configured to seal a connection part between two seal...
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JP6534358B2 |
A cryopump includes: a first-stage target temperature selection unit which includes a normal target temperature for a normal mode of maintaining each of a first stage cryopanel and a second stage cryopanel at an extremely low temperature...
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JP2019090410A |
To provide a method and system for a gas booster, preferably used together with hydrogen.A linear actuator may provide compression in first and second compression vessels. A liner of the compression vessel may be arranged in compression ...
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JP6522892B2 |
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JP2019078252A |
To provide a powder trap filter device that extends an interval between maintenance (cleaning) services more than existing powder trap filter devices.A powder trap filter device 1 includes at least: a predetermined housing 10; a cylindri...
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JP6512674B2 |
The present invention relates to a pumping system to generate a vacuum (SP), comprising a main vacuum pump which is a claw pump (3) having a gas suction inlet (2) connected to a vacuum chamber (1) and a gas discharge outlet (4) leading i...
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JP6511437B2 |
A device for evacuating a film chamber using a pump system that comprises at least two vacuum pumps, designed to evacuate the film chamber alternately. A suction capacity of the first vacuum pump is greater than that of the second vacuum...
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JP6509176B2 |
To provide a pump having a seal to be rubbed, to overcome demerits in the prior art and to improve known solution, and capable of elongating a service life of the pump.A pump 10, in particular, a vacuum pump has at least two transport el...
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JP6490759B2 |
To provide a vacuum system enabling simple and/or flexible operation and/or having reliability, and a simple and/or flexible method for operating the vacuum system.An assembly comprises: a vacuum system, especially a vacuum pump, or at l...
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JP2019031924A |
To provide a dry pump vacuum device capable of reducing adverse effect that a control unit incurs from a high-temperature pump body.A dry vacuum pump device 100 has a pump body unit 32 and a pump control unit 36. The pump body unit 32 ha...
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JP6475211B2 |
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JP6472653B2 |
A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated w...
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JP6466226B2 |
A cryopump includes a radiation shield, a top cryopanel, and a bottom cryopanel. The radiation shield includes a shield main slit that communicates a shield outside gap into a shield cavity. The top cryopanel includes a top cryopanel out...
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JP6466225B2 |
A cryopump includes a top cryopanel that partitions a shield cavity into a shield cavity upper portion and a shield cavity lower portion. A radiation shield includes a shield main slit that communicates a shield outside gap into the shie...
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JP2019503163A |
The present invention electrically connects to at least one electric motor (18) connected to a rotor (14) of a vacuum pump (13) via a drive shaft (16) and to an electric motor (18). It relates to a vacuum pump drive (12) comprising a fre...
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JP6459771B2 |
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JP6461733B2 |
The fan scrubber is provided with a casing having a gas draw-in port and a gas ejection port, a fan disposed in the casing, a nozzle from which a liquid is jetted into the casing, and a canned motor connected to the fan. The canned motor...
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JP2019012812A |
To provide an exhaust facility in which the residual amount of by-products in an exhaust facility is reduced to further improve the operation rate of the exhaust facility.In order to evacuate a chamber 14 of a semiconductor manufacturing...
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