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JP2021513580A |
A composite material, a) a porous matrix material containing a siloxane polymer, comprising a closed porosity volume fraction and optionally an open porosity volume fraction, and b) the porous matrix material a). Composites containing co...
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JP6874943B2 |
To provide a MEMS element capable of achieving an improvement in sensitivity and miniaturization at the same time, and a method of manufacturing the same.A MEMS element in which a movable electrode 3 and a fixed electrode 5 formed on a s...
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JP6822915B2 |
To provide a manufacturing method of an electrode material used for a fixed electrode and a variable electrode for a vacuum capacitor which is excellent in breakdown voltage characteristics.Provided is a manufacturing method of an electr...
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JP6820855B2 |
An illustrative electrostatic machine includes a shaft that is configured to rotate about an axis, a rotor electrode, and a stator electrode. The rotor electrode and the stator electrode are separated by a gap and form a capacitor. The r...
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JP2020095772A |
To provide a circular accelerator with a rotary capacitor, having high durability, capable of rotating at high speed.A circular accelerator comprises: a stator electrode; and a rotor electrode having a rotor electrode surface which forms...
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JP6710715B2 |
Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the sam...
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JP6655006B2 |
The present invention generally relates to a method of operating a MEMS DVC while minimizing impact of the MEMS device on contact surfaces. By reducing the drive voltage upon the pull-in movement of the MEMS device, the acceleration of t...
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JP6519424B2 |
The high dielectric resin composition of the present invention is a high dielectric resin composition for forming a sealing film in an electrostatic capacity type sensor, and contains an epoxy resin (A) and a relative dielectric constant...
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JP6501757B2 |
The present invention generally relates to a MEMS DVC having a shielding electrode structure between the RF electrode and one or more other electrodes that cause a plate to move. The shielding electrode structure may be grounded and, in ...
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JP6469376B2 |
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JP6461030B2 |
According to one embodiment, an electronic device includes a base region, an element portion located on the base region, the element portion including a movable portion, and a protective film overlying the element portion and forming a c...
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JP2019009201A |
To improve cooling performance of a capacitor.In a vacuum capacitor 1, a fixed electrode 3 and a movable electrode 4 are disposed facing each other in a vacuum vessel 2. The vacuum vessel 2 is formed by closing an insulating cylindrical ...
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JP6433842B2 |
According to one embodiment, an electronic device includes an underlying region, a variable capacitor including fixed electrodes and movable electrodes alternately arranged in a direction not perpendicular to a main surface of the underl...
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JP6434502B2 |
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JP6434491B2 |
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JP6426164B2 |
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JP2018157013A |
To provide a variable capacitor in which multiple specific capacities can be adjusted, respectively, in a certain range.A variable capacitor 1 includes first and second variable capacitors 20, 30 connected in parallel and a capacity adju...
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JP6396440B2 |
The present invention generally relates to a MEMS DVC. The MEMS DVC has an RF electrode and is formed above a CMOS substrate. To reduce noise in the RF signal, a poly-resistor that is connected between a waveform controller and the elect...
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JP6397913B2 |
The present invention generally relates to a MEMS DVC utilizing one or more MIM capacitors. The MIM capacitor may be disposed between the MEMS device and the RF pad or the MIM capacitor may be integrated into the MEMS device itself. The ...
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JP6374489B2 |
A vacuum variable capacitor includes a pre-vacuum enclosure for reducing a pressure differential across the bellows. The vacuum force load on the drive system can thereby be reduced, allowing faster movement of the movable electrode, fas...
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JP6275249B2 |
A vacuum variable capacitor includes a pre-vacuum enclosure for reducing a pressure differential across the bellows. The vacuum force load on the drive system can thereby be reduced, allowing faster movement of the movable electrode, fas...
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JP6260661B1 |
[Subject] The number of times of the soldering process of a capacitor is reduced, and the manufacturing cost of a capacitor is reduced. [Means for Solution] It is a manufacturing method of vacuum capacitor 1 provided with insulating pipe...
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JP6235472B2 |
In a MEMS device, the manner in which the membrane lands over the RF electrode can affect device performance. Bumps or stoppers placed over the RF electrode can be used to control the landing of the membrane and thus, the capacitance of ...
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JP2017201646A |
To provide a capacitor unit and a wireless charging system for vehicles which can be reduced in size and weight with a relatively simple structure.The capacitor unit includes: a battery pack B 1 configured by accommodating a plurality of...
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JP6227408B2 |
A vacuum capacitor has at least two electrodes in a vacuum, the electrodes being manufactured from, or coated with, aluminium or an aluminium alloy; and the housing of the vacuum capacitor includes an insulating (e.g., ceramic) part and ...
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JP2017195467A |
To obtain a temperature compensation circuit which can be manufactured in a low cost with a simple structure by reducing a component number.A temperature compensation circuit comprises: a reference line 11; a phase variable circuit 12 ar...
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JP6188801B2 |
A variable capacitor (300) comprises cells (200, 400) that have an RF electrode (202, 402) coupled to a bond pad (30). Each cell comprises a plurality of MEMS devices (100) the capacitance of which can be changed by means of a movable el...
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JP2017147363A |
To provide a MEMS device in which the minimum capacity of a variable capacitor is stabilized.A MEMS device according to an embodiment includes: a first electrode formed on a substrate; a second electrode that is disposed movably in a ver...
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JP6147689B2 |
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JP6146837B2 |
To provide a capacitor in which capacitance can be changed and adjusted without using a trimmer capacitor and many capacitors.A capacitor includes: a first conductor layer and a second conductor layer that are disposed facing each other ...
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JP2017069327A |
To provide a trimmer capacitor at a lower cost.A trimmer capacitor includes a stator having a thermoplastic resin substrate, and a first electrode formed on the top face of the thermoplastic resin substrate, and a rotor having a ceramic ...
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JP6107827B2 |
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JP6042984B2 |
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JP6038362B2 |
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JP6034367B2 |
The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the landing velocity on switching by introducing gas into the cavity surrounding the switching element of the MEMS device. The gas...
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JP2016172291A |
To provide electronic equipment capable of preventing generation of a crack on a protection film.Electronic equipment in an embodiment includes: a MEMS element 20 provided on a ground region 10; and a protection film 30 including a first...
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JP2016172292A |
To provide an MEMS device which inhibits performance deterioration.An MEMS device includes: a substrate 100; first electrodes 111 fixed onto the substrate 100; a capacitor insulator film 113 provided on the first electrodes 111; insulato...
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JP2016171224A |
To provide a variable capacitor bank device that is constructed by using parallel connection of a plurality of capacitor banks using MEMS elements and has high reliability and high electric power durability.Each capacitor bank comprises:...
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JP2016170018A |
To provide a MEMS device capable of preventing thermal expansion of a connection part having a lamination structure in the MEMS device.A MEMS device includes: a variable capacitor 100 having a first electrode (lower electrode) 20 which i...
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JP2016165796A |
To replace a function of one relatively large-sized MEMS device or digital variable capacitor using a number of small-sized MEMS devices.A number of relatively small-sized MEMS devices execute the same function as the relatively large-si...
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JPWO2014054751A1 |
To provide a variable capacitance capacitor capable of increasing the variable range of the facing distance of a capacitive electrode. According to the present invention, a pair of capacitive electrodes 24, 34 provided facing each other ...
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JP2016524328A |
The present invention generally relates to methods and devices for attenuating a plate electrode or switching electrode in a MEMS DVC device. A resistor installed between the waveform controller and the MEMS DVC electrode decreases in ca...
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JP5968467B2 |
A variable vacuum capacitor includes two pairs of electrodes ganged together in series such that no moving parts are required to connect electrically to any static pans. Two sets, or gangs, of movable electrodes are connected mechanicall...
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JP2016137565A |
To provide a manufacturing method of a MEMS device capable of improving operational reliability.A first film layer 101 is formed on a sacrifice base layer 102, a second film layer 105 is formed on the first film layer, and the second fil...
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JP5965497B2 |
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JP5951344B2 |
According to one embodiment, a MEMS device comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face the first electrode, and vertically movable, a second anchor portion formed on the s...
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JP5939633B2 |
A variable capacitance type capacitor (10) includes an inside member (2) and an outside member (1) including a space for housing the inside member (2). The inside member (2) has a columnar shape, and a first conductor pattern (23) is for...
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JP5922249B2 |
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JP5921477B2 |
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JP5908335B2 |
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