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WO/2020/182306A1 |
The present invention provides a linear motor (1) having a forward mode and a backward mode. The linear motor (1) comprises: a reciprocating unit (20) arranged to be moved in a forward direction (FW) and in a backward direction (BW), and...
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WO/2020/181790A1 |
A bionic flexible actuator having a real-time feedback function and a preparation method therefor. The method comprises: preparing a stimulus response layer (10) and a bionic flexible strain sensing film layer (30), and providing a bioni...
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WO/2020/184769A1 |
A haptic controller according to the present invention comprises: a main body part for providing a place for a grip by a hand of a user; an auxiliary body part for forming one whole body together with the main body part; a motion sensor ...
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WO/2020/181383A1 |
A thermoelectric fan including: a heat collector; a thermoelectric generator (TEG) thermally coupled to the heat collector; a heat sink thermally coupled to the TEG and positioned to provide a temperature differential across the TEG; a m...
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WO/2020/185944A1 |
Various disclosed embodiments include combined heating and power modules and combined heat and power devices. In an illustrative embodiment, a combined heat and power module includes at least one burner. At least one thermionic energy co...
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WO/2020/185467A1 |
An electrostatic chuck system for a plasma processing chamber is provided. A base plate comprising Al-SiC is provided. A ceramic plate is disposed over the base plate. A bonding layer bonds the ceramic plate to the base plate.
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WO/2020/185413A1 |
The present disclosure relates to methods and systems for chucking in substrate processing chambers. In one implementation, a method of chucking one or more substrates in a substrate processing chamber includes applying a chucking voltag...
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WO/2020/185835A1 |
A method of depositing material to manufacture an electrostatic chuck is provided. The method first deposits at least one layer of a first dielectric material on a handle using spin coating and/or direct spraying method. A functional ele...
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WO/2020/185395A1 |
Embodiments of an electrostatic chuck are provided herein. In some embodiments, an electrostatic chuck for use in a substrate processing chamber includes a plate having a first side and a second side opposite the first side, a first elec...
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WO/2020/182637A1 |
An electrostatic clamp for supporting a substrate includes a substrate region, an electrode region at an edge of the substrate region, a support layer, an electrically conductive layer, a contact layer, and an electrode. The support laye...
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WO/2020/180234A1 |
An electrical machine (1) operating by switching of magnetic flux comprises a first magnetic structure(10), a second magnetic structure (20) and a winding (30). The first and second magnetic structures are arranged movable relative to ea...
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WO/2020/178320A1 |
The invention relates to a method for operating an electromechanical element, comprising the following steps: by actuating a first actuation section (A1), which can be deformed by an electrical voltage, with a first voltage signal (S10),...
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WO/2020/178080A1 |
The present invention is directed to a method for processing a fragile, e.g. (ultra-)thin and/or large, substrate (1) having a front side surface and a back side surface, the method comprising bonding the back side surface of the substra...
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WO/2020/175257A1 |
This dielectric elastomer power generation system is provided with: a power generation unit which includes a dielectric elastomer power generation element having a dielectric elastomer layer and a pair of electrode layers sandwiching the...
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WO/2020/040536A9 |
The present invention relates to an electric power generation element for generating electric power from a magnetic field formed by an AC power source flowing through an electric power cable, the electric power generation element compris...
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WO/2020/172070A1 |
An electrostatic chuck (ESC) is provided. An ESC body is provided. An organic coating is disposed on at least a surface of the ESC body
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WO/2020/170988A1 |
A vibrating power generation element formed by processing a substrate that has a first Si layer and a second Si layer provided via an insulating layer. The vibrating power generation element comprises: a fixed electrode formed on the fir...
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WO/2020/171770A1 |
An electromechanical motor (1) comprises a stator (2) and a translator (10). The stator has two electromechanical actuators (20) having electromechanically active material (26) and means (35) for providing exciting signals. The translato...
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WO/2020/170514A1 |
The electrostatic chuck device according to the present invention is such that: a cross-sectional shape of a substrate in the thickness direction forms a convex curved surface or a concave curved surface that gradually curves from the ce...
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WO/2020/171179A1 |
A sample holder (100) is provided with an insulating substrate (1) and a heat-generating resistor (4), and is further provided with a support (2) and a bonding material (3). The insulating substrate (1) is a ceramic body having a first s...
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WO/2020/170624A1 |
The present invention comprises: a rod (10) used as a rod-shaped member; an electroconductive polymer actuator (20) having an electroconductive polymer (22) that expands and contracts in a prescribed direction due to electric current; an...
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WO/2020/165270A1 |
The present application relates to an electronic device comprising a piezoelectrically active composite layer as well as a method for producing such electronic device. The present application also relates to an electronic apparatus compr...
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WO/2020/166363A1 |
This thermoelectric power generation device comprises a thermoelectric power generation module, a vibration sensor that is driven by the electrical power generated by the thermoelectric power generation module, and a wireless communicati...
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WO/2020/164756A1 |
The present invention relates to a hybrid energy harvesting unit (1) configured to har- vest energy when being attached to an object (2) in motion. The hybrid energy har- vesting unit (1) may be configured to be attached to the object (2...
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WO/2020/167451A1 |
An electrostatic chuck for a substrate processing system includes a monolithic body made of ceramic. A plurality of first electrodes are arranged in the monolithic body adjacent to a top surface of the monolithic body and that are config...
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WO/2020/160698A1 |
Disclosed is a magnetic kinetic energy inertial power generation device, comprising a housing (1), a stator (2), a rotor (3), a permanent magnet (4), a power generation conductor (5), and a current output interface (6). The magnetic kine...
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WO/2020/162676A1 |
The present invention relates to a self-customizable micro LED garment capable of changing colors and patterns like a TV screen and, more particularly, to a useful invention comprising: a garment (100) composed of upper and lower garment...
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WO/2020/163060A1 |
Embodiments of the disclosure include methods and apparatus for electrostatically coupling a mask to a substrate support in a deposition chamber. In one embodiment, a substrate support is disclosed that includes a substrate receiving sur...
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WO/2020/154816A1 |
A passive magnetic constant-force apparatus comprises a geometry and arrangement of permanent magnets, ferromagnetic components, and non-magnetic structural components. The apparatus is easily and precisely adjustable, cost-effective, wi...
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WO/2020/155830A1 |
Disclosed is a planar motor displacement device, comprising at least a stator and a motor. The stator comprises at least one magnet array that extends on a first plane parallel to X and Y directions to form a working area. The motor comp...
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WO/2020/152955A1 |
This method for installing a thermoelectric converter (1) is a method for installing the thermoelectric converter (1) on a wall (Wa10) that has: an outside wall (Wa1); and an inside wall (Wa2) placed so as to be adjacent to the outside w...
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WO/2020/153449A1 |
This electrostatic chuck is provided with: an insulation substrate (1) having a sample holding surface; and a support body (2) joined to the insulation substrate (1). A first through-hole (9) provided in the insulation substrate (1) and ...
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WO/2020/151976A1 |
The invention relates to a device that comprises an energy harvester to harvest a small amount of energy upon an action of a user. The device is configured to use this energy to activate one or more sensors and, based on the position, at...
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WO/2020/153362A1 |
This vibration power generation element is provided with: a fixed electrode section and a movable electrode section that are formed on a second layer of a substrate provided with a first layer and a second layer having an insulating laye...
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WO/2020/151440A1 |
A saliva test device and system, and an operating method thereof. The saliva test device comprises a flexible friction power generation assembly configured to supply power to the saliva test device and sequentially comprising: a first el...
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WO/2020/152905A1 |
Provided is a stacked piezoelectric element that is capable of accurately and efficiently operating a target.　The stacked piezoelectric element 100 comprises a stacked structure 50 in which a plurality of piezoelectric body layers have...
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WO/2020/152365A1 |
The invention relates to an electromechanical linear drive (1), comprising a housing (2), an electromechanical drive unit (3), a transmission element (4) which is coupled to the electromechanical drive unit (3), and an element (8) to be ...
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WO/2020/153359A1 |
[Problem] To provide a thermoelectric conversion device that has a relatively excellent conversion efficiency using a nano-sized through holes. [Solution] According to the present invention, a filmmembrane body 11 has a plurality of nano...
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WO/2020/153119A1 |
This display device of a reflection-type has: a power generation part including a power generation element; and a display part including a plurality of pixels and an insulating layer, wherein the insulating layer has a first surface and ...
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WO/2020/149510A1 |
The present invention relates to a method, performed by a server, for control and analysis based on a pattern of piezoelectric data occurring at time intervals, the method comprising: (a) a step in which at least one contact sensor dispo...
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WO/2020/149052A1 |
This tactile presentation device is provided with a sheet-like electric field responsive polymer actuator which expands and contracts in a planar direction and a thickness direction in accordance with an applied voltage, wherein a user i...
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WO/2020/149353A1 |
A dielectric elastomer transducer A1 according to the present invention is provided with a dielectric elastomer layer 11 and a pair of electrode layers 12 between which the dielectric elastomer layer 11 is sandwiched; and the electrode l...
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WO/2020/149108A1 |
An optical device actuator is provided with a movable frame (33) including a focusing lens (L11), a main shaft guide (40), a piezoelectric element (36a), a weight (36b), a fixed frame (30), a guide retaining frame (35), and a spring (36c...
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WO/2020/147721A1 |
A micro power generation device comprises a plurality of generators stacked on each other vertically in sequence. Each generator comprises: an upper electrode and a lower electrode vertically spaced apart from each other; a spacer provid...
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WO/2020/149265A1 |
This MEMS beam structure that elastically supports a moving section displaced in a first direction comprises: a first beam section and a second beam section extending in a second direction orthogonal to the first direction; and a linking...
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WO/2020/148916A1 |
This power generation device is provided with: a permanent magnet (3) provided so as to be displaceable with respect to a conductor (W) through which alternating current flows; a conversion unit for converting the vibration energy of the...
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WO/2020/147443A1 |
A moisture power generation method and equipment. The method comprises the following steps: pouring a polymer solution into a culture dish and then placing same in an oven to prepare a polymer power generation film (100) (S101); placing ...
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WO/2020/145396A1 |
In this invention, to provide a wearable device equipped with a thermoelectric conversion element having high thermoelectric conversion efficiency, a wearable device is made to comprise a thermoelectric conversion element for converting ...
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WO/2020/146542A1 |
A footwear apparatus has a bottom portion on which a foot of a user is positioned. The bottom portion has a heel portion and a toe portion. Further, the footwear apparatus has a rear portion operably attached to the heel portion. Additio...
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WO/2020/144969A1 |
Provided is a control device comprising a control unit that controls driving of a motor that generates power provided to a gearbox, controlling same on the basis of temperature information for the gearbox which comprises a power transmis...
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