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WO/2015/015922A1 |
Disclosed is a filter wherein: the filter may be provided with a first member having a flow channel formed on a first surface, and a second member that is disposed such that a second surface covers the flow channel; the first member may ...
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WO/2015/014531A1 |
Disclosed is component for a radiation source, said radiation source being operable to generate radiation from a fuel, said component having a surface comprising a plurality of first regions that have a high wettability by said fuel, sep...
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WO/2015/013185A1 |
An EUV light source includes a rotatable, cylindrically-symmetric element having a surface coated with a plasma-forming target material, a drive laser source configured to generate one or more laser pulses sufficient to generate EUV ligh...
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WO/2015/005380A1 |
Increasingly miniaturizing a Cockcroft-Walton high-voltage generation device carries the risk of discharges from connection points between components, i.e. insufficient insulation reliability. This Cockcroft-Walton circuit (1) comprises ...
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WO/2015/004972A1 |
This X-ray detection signal processing unit (5A) is provided with a preamplifier (50) for amplifying a signal outputted by an X-ray detection unit (4), a buffer amplifier (51), a coaxial cable (55), a preamplifier power source (56) for s...
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WO/2015/001144A1 |
The invention relates to a device comprising: a chassis (1) supporting the assembly; a telescopic column (2) including a lower fixed segment (5) that rotates about a vertical axis and at least one upper mobile segment (6); and a telescop...
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WO/2015/001139A1 |
The invention relates to an X-ray machine having a tape measure or measuring tape (5) attached to or incorporated in the X-ray emission unit comprising an X-ray tube (3) and a collimator (4), said tape measure being located on the tube i...
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WO/2014/206935A1 |
The invention relates to an EUV radiation generating device (30), comprising: at least one radiation source (31) for generating a first and second entrance beam (3a, 3b), and a beam influencing optical unit (1) for influencing the first ...
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WO/2014/206706A1 |
A radiation source generates extreme ultraviolet radiation. The radiation source comprises a plasma formation site located at a position in which a fuel will be contacted by a beam of radiation to form a plasma. A receiving structure is ...
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WO/2014/205410A1 |
The generation of EUV light includes rotating a cylinder at least partially coated with a plasma-forming target material, directing pulsed illumination to a first set of helically-arranged spots traversing a material-coated portion of th...
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WO/2014/203804A1 |
An extreme ultraviolet light generating system of the present invention may be provided with: a laser apparatus that supplies pulsed laser light to the inside of a chamber where EUV light is generated; a light shutter that is disposed on...
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WO/2014/205429A1 |
A gas bearing assembly including: a stator, a spindle rotatable about an axis, a first space between the spindle and the stator and arranged to receive a bearing gas at a first pressure, to support rotation of the spindle about the axis,...
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WO/2014/197023A2 |
A device for producing x-rays includes: a housing that includes a folded high-voltage multiplier coupled to a filament transformer, the transformer coupled to an x-ray tube for producing the x-rays. A method of fabrication and an x-ray s...
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WO/2014/196914A1 |
The present invention relates to an arrangement (205, 2051, 2052, 2053, 2054, 2055, 305, 405) for measuring a X-ray dose parameter. The arrangement comprises a detector (3051, 3052) for detecting said x-ray dose. The arrangement is confi...
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WO/2014/192872A1 |
This extreme ultraviolet generation system may include: a chamber; a target generation unit that is configured to output a target toward a plasma generation region in the chamber; a laser system that generates first prepulse laser light,...
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WO/2014/189571A2 |
A method includes creating a gas flow in a gas cell (110) and cooling a portion of the gas flow to create a thermally-induced temperature gradient in the gas flow. The method also includes directing at least one laser beam (104) through ...
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WO/2014/187586A1 |
The invention relates to an X-ray source (1) having an outer housing (3) that can be evacuated, comprising at least one radiation exit window (5), an electron source (7) for emitting an electron beam and an anode (13) for producing X-ray...
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WO/2014/188176A1 |
An X-ray source comprising: an elongate tubular housing adapted to be fitted Into a port of and extend into a chamber containing a sample to be analysed, said housing containing: an electron gun and a target mounted in the housing, the e...
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WO/2014/189055A1 |
To stabilize a state of a droplet to be outputted to the inside of a chamber. This extreme ultraviolet light generating apparatus may be provided with: a target supplying unit, which outputs, as a droplet, a target to the inside of a cha...
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WO/2014/184588A1 |
An x-ray / gamma ray imaging apparatus includes a pixellated x- ray / gamma ray detector (3) comprising a member configured to detect incident x-ray / gamma ray wavelength photons a position for a body under test (2), an x-ray or gamma r...
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WO/2014/178177A1 |
To cause a stable emission of extreme UV radiation from a laser-produced plasma, an extreme UV radiation light source device is disclosed, wherein a liquid or a solid raw material is supplied stably with fewer scattering of debris into t...
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WO/2014/171689A1 |
A detachable X-ray generating device proposed in the present invention comprises: an X-ray generating unit including an X-ray generating tube for irradiating an X-ray and a first connecting portion connected to the X-ray generating tube ...
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WO/2014/171497A1 |
The present invention provides a light source apparatus and method for further improving the generation efficiency of EUV light. Using an EUV light source apparatus (1), a "first state" and a "second state" are alternately achieved. In t...
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WO/2014/166468A1 |
The aim of the invention is to provide an arrangement for an electron beam x-ray computer tomography, said arrangement making do without the considerable axial extension of the electron emitter and largely omitting electron-optical beam ...
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WO/2014/169071A1 |
The present disclosure is directed to a system for protecting a reflective optic and/or any other surface in a plasma-based illumination system from debris by actively flowing gas against the debris flow direction. According to various e...
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WO/2014/162628A1 |
A rotating positive electrode X-ray tube unit (5) is provided with a rotating positive electrode X-ray tube (30) and a flow-path-forming body. The rotating positive electrode X-ray tube (30) has a negative electrode, a positive electrode...
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WO/2014/161698A1 |
A source collector apparatus for use in a lithographic apparatus comprises a fuel droplet generator (4) configured in use to generate a stream of fuel droplets (6) directed from an outlet of the fuel droplet generator towards a plasma fo...
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WO/2014/158464A1 |
An EUV light source target material handling system is disclosed which may comprises droplet generator having a target material reservoir in which the target material may he replenished while a nozzle portion of the droplet generator is ...
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WO/2014/154433A1 |
A radiation collector comprising a first collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a first location at a distance from the radiation collector, a second c...
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WO/2014/155776A1 |
It has been very difficult to accumulate strong laser in the conventional optical resonator, because firstly it has been very difficult to control a resonator length less than 1 dstrok; in resonation position which is required for the la...
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WO/2014/149436A1 |
Techniques are described that enhance power from an extreme ultraviolet light source with, feedback from a target material that has been modified prior to entering a target location into a spatially-extended target distribution or expand...
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WO/2014/151454A1 |
Contrast agents for x-ray imaging including stabilized metal nanoparticles and encapsulated nanoparticles, as well as methods for imaging tissue with these agents, are disclosed. Also disclosed are methods of dual energy x-ray imaging us...
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WO/2014/149435A1 |
A system for an extreme ultraviolet light source includes one or more optical elements positioned to receive a reflected amplified light beam and to direct the reflected amplified light beam into first, second, and third channels, the re...
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WO/2014/147901A1 |
An extreme ultraviolet light generating device is provided with: a chamber that contains a prescribed gas inside thereof; a light converging optical system that is disposed in a light path for pulse laser light output by a laser device a...
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WO/2014/143504A1 |
Techniques for generating EUV light include directing a first pulse of radiation toward a target material droplet to form a modified droplet, the first pulse of radiation having an energy sufficient to alter a shape of the target materia...
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WO/2014/143694A1 |
An x-ray device utilizes a band of material to exchange charge through tribocharging within a chamber maintained at low fluid pressure. The charge is utilized to generate x-rays within the housing, which may pass through a window of the ...
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WO/2014/139713A1 |
Disclosed are apparatus, systems, and methods for operating a radiation source that jets up a fuel for plasma generation and for recycling of the unused fuel. For an illumination system of a lithographic apparatus, a radiation source is ...
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WO/2014/137331A1 |
Examples of electronic circuits and methods are provided. A power adapter is coupled to load device such that a power node and a signal node and a ground node are common to both entities. A supply voltage is regulated and provided by the...
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WO/2014/138673A1 |
A method for regulating output of a high voltage generator includes monitoring a voltage output of the generator and comparing it to a voltage setpoint to generate an error signal. A load on the generator is monitored to generate a load ...
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WO/2010/020490A9 |
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WO/2014/133797A1 |
A sealed cold cathode X-ray tube for use in small X-ray source devices is provided. In one embodiment, a scaled cold cathode X-ray tube includes an elongate member, a cathode emitter, and an anode. The sealed cold cathode X-ray tube is f...
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WO/2014/125939A1 |
Provided is a wireless communication device and system and a radiography system which are capable of conducting stable wireless communication. This radiography system comprises a radiation delivery device, a radiation image detection dev...
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WO/2014/124938A1 |
The invention relates to an x-ray device (10a-b), comprising at least one high-voltage supply unit (22a-b), at least one x-ray radiation unit (20a-b) for producing an x-ray beam (48a-b), at least one focusing unit (24a-b) for focusing th...
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WO/2014/126667A2 |
A method and apparatus for controlling the seed laser in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system are disclosed, in one embodiment, a seed laser generates both pre-pulses and main pulses which are amplified an...
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WO/2014/124769A1 |
A method of manufacturing a multi-layer mirror (500) comprising a multi-layer stack of pairs of alternating layers of a first material (510) and silicon (520), the method comprising depositing a stack of pairs of alternating layers of th...
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WO/2014/123835A1 |
There is provided an x-ray source (10) comprising: an enclosure body (12); a target (14) permanently fixed to or forming part of the enclosure body (12); an electron beam source within the enclosure body (12), the electron beam source (1...
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WO/2014/121873A1 |
A radiation source apparatus is configured to generate a beam of radiation by excitation of a fuel into a plasma. The apparatus comprises a receiving structure (504) for capturing fuel debris during operation and a heating arrangement (5...
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WO/2014/119079A1 |
Provided is an X-ray radiation source (2) in which, among the wall sections of a housing (51) for an X-ray tube (21), facing wall sections (51b) formed from alkali-containing glass are arranged to face a high-voltage area (VH) of a power...
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WO/2014/119080A1 |
Provided is an X-ray radiation source (2) in which, among the wall sections of a housing (51) for an X-ray tube (21), facing wall sections (51b) formed from alkali-containing glass are sandwiched by a filament (52) and an electric field ...
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WO/2014/119227A1 |
A radiation generating apparatus (1) includes a radiation tube (2) including an electrically insulating tubular member, a cathode (31) provided at one of two openings of the tubular member, and an anode (33) provided at the other opening...
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