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WO/2016/047437A1 |
This mobile X-ray imaging device comprises an X-ray high voltage generator and an X-ray tube assembly. The X-ray high voltage generator comprises a storage battery, a capacitor, and a recovering unit that recovers electrical power accumu...
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WO/2016/043318A1 |
Provided is a light source device and a method with which the efficiency of generating EUV light can be further improved. [Solution] According to this EUV light source device, a noble gas is supplied into a space inside a hollow body 2 c...
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WO/2016/043313A1 |
Provided is an EUV light source system that can achieve further improvements in the irradiance of EUV light. Plasma is formed in an interior space of a hollow body (2) as a result of the energy of standing waves that are formed in an int...
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WO/2016/038506A1 |
An extreme ultraviolet (EUV) radiation source pellet(8) includes at least one metal particle (30) embedded within a heavy noble gas cluster (20) contained within a noble gas shell cluster (10). The EUV radiation source assembly can be ac...
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WO/2016/038657A1 |
This transmission system for transmitting a pulsed laser beam into an extreme UV light chamber may contain: an optical path adjustment device whereby the optical path of a first pre-pulsed laser beam and the optical path of a second pre-...
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WO/2016/034409A1 |
The present invention relates to a high voltage generator (100) for supplying an X-ray tube (200), the high voltage generator (100) comprising: a voltage regulator device (100-1), which is configured to provide a DC voltage; a plurality ...
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WO/2016/030485A1 |
Disclosed is a laser-driven photon source comprising drive optics which focus drive radiation so as to maintain a plasma. The point spread function of the drive optics has a point spread function (75) which is configured such that a spec...
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WO/2016/032683A1 |
The present invention discloses a method for removing streaks from detector cells with performance difference, specifically a method for removing streaks from detector cells with performance difference and streaks caused by other reasons...
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WO/2016/027346A1 |
This extreme ultraviolet light generation system may be provided with: a chamber; a target supply unit configured to supply a target to a predetermined region in the chamber, said target having an atomic density of 8.0×1017-1.3×1018 at...
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WO/2016/022267A1 |
A droplet generation system for use with a laser produced plasma (LPP) extreme ultraviolet (EUV) source plasma chamber is described. During EUV generation, oscillations can occur as a function of droplet time-of-flight within the plasma ...
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WO/2016/012192A1 |
A radiation source arranged to receive an initiating radiation beam. The radiation source comprises a polarisation adjustment apparatus and a focussing unit configured to focus the initiating radiation beam to be incident on a fuel targe...
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WO/2016/013114A1 |
To improve energy stability of EUV light. This extreme ultraviolet light generation apparatus may be provided with: a chamber wherein extreme ultraviolet light is generated from plasma generated by irradiating a target with laser light, ...
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WO/2016/013102A1 |
A target sensor used in this extreme ultraviolet light generation apparatus may include: a plurality of sensor elements that respectively output sensor signals which change corresponding to quantities of light received by light receiving...
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WO/2016/013550A1 |
The present invention improves the energy stability of EUV light. An extreme UV light generation device is provided with a chamber in which extreme UV light is generated from a plasma produced by directing a laser beam at a target suppli...
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WO/2016/013515A1 |
An extreme ultraviolet light generation device that uses a target sensor that may contain multiple sensor elements each of which outputs a sensor signal that changes in accordance with the amount of light received on a light-receiving su...
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WO/2016/007312A2 |
An initial pulse of radiation is generated; a section of the initial pulse of radiation is extracted to form a modified pulse of radiation, the modified pulse of radiation including a first portion and a second portion, the first portion...
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WO/2016/005006A1 |
The device relates to a driver laser arrangement (12) for an EUV radiation generation apparatus (1), comprising: a radiation source (2) for generating pulsed laser radiation (7) having a laser frequency (fL), and an amplifier arrangement...
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WO/2016/006162A1 |
Disclosed are a debris trap device equipped with a rotary foil trap and cover member and capable of trapping debris stably with minimal defects in the rotary foil trap, and extreme ultraviolet light source equipment including the debris ...
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WO/2016/006100A1 |
This extreme ultraviolet light generation device generates extreme ultraviolet light by bringing a target into a plasma state by irradiating the target with pulsed laser light. The extreme ultraviolet light generation device may be provi...
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WO/2016/001973A1 |
A target supply device (7A) may be provided with: a tank (84A) that contains a metallic target material (270); a nozzle (86A) having a nozzle hole (822A) through which the target material (270) is outputted from the tank (84A); a filter ...
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WO/2015/196912A1 |
Provided in the present invention is a B/S architecture-based radiograph inspection system characterized in being provided with: a client that launches an image operation request and is capable of displaying an image operation result dir...
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WO/2015/199218A1 |
Provided is a high voltage device in which the rise and fall times of the output voltage can be reduced while suppressing the switching loss during the normal period. The high voltage device is equipped with: an inverter connected betwee...
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WO/2015/185762A1 |
A multiple energy single electron beam generator (1) comprising a generator system (2) adapted to deliver a first beam of electrons (13) at a first energy (E1) along a first axis (A1) at a first output (14) and a second beam of electrons...
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WO/2015/185152A1 |
The invention relates to a device comprising a drive laser assembly having a beam source for generating a laser beam (7) and having an amplifying assembly for amplifying the laser beam (7), and comprising a unit (15) for monitoring the l...
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WO/2015/185003A1 |
Disclosed is a collimation modulatable X-ray generator. The X-ray generator comprises an X-ray source assembly including an X-ray tube with a cathode and an anode and a front collimator; a high voltage generator used for supplying the di...
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WO/2015/182317A1 |
A learning unit (25) in learning mode generates a cluster from a cluster analysis of data formed from frequency constituent data (Fa) and state data (x, y, z, T, θ), obtained from a sensor unit (13). An abnormality calculation unit (26)...
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WO/2015/182092A1 |
The present invention discloses an extreme ultraviolet light source device with which efficient EUV radiation can be stably obtained. This EUV light source device (100) is provided with a first laser source (31a) which shines a laser lig...
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WO/2015/178228A1 |
An X-ray generation target (112) is provided with a substrate in one embodiment. Also, in the one embodiment, the X-ray generation target is provided with a plurality of first X-ray nano-targets (112f) that are disposed on the substrate,...
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WO/2015/169937A1 |
The invention relates to a system and to a method for analyzing a light beam conducted by a beam-conducting optical unit. A system according to the invention comprises a graduated neutral-density filter assembly (120, 520), which is arra...
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WO/2015/171927A1 |
Ultralow-dose, x-ray or gamma-ray imaging is based on fast, electronic control of the output of a laser-Compton x-ray or gamma-ray source (LCXS or LCGS). X-ray or gamma-ray shadowgraphs are constructed one (or a few) pixel(s) at a time b...
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WO/2015/166524A1 |
This extreme ultraviolet light generation apparatus may include: a target supply unit that supplies a target from a nozzle; a first illuminating apparatus, which outputs light having first characteristics, and which illuminates the targe...
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WO/2015/167753A2 |
The structure of materials can be characterized (e.g., via CD-SAXS) by generating a burst of electron bunches in a pulse train and accelerating the electron bunches to relativistic energies. Meanwhile, an optical cavity is filled with a ...
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WO/2015/166526A1 |
This target-supplying device (7A) is provided with a tank (711A) that stores a target substance (270), a nozzle (718A) that is connected to said tank (711A) and outputs the target substance (270), and a gas-supplying unit (73A) that supp...
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WO/2015/166868A1 |
This target-supplying device (7A) is provided with a tank (711A) that stores a target substance (270), a nozzle (718A) that is connected to said tank (711A) and outputs the target substance (270), and a gas-supplying unit (73A) that supp...
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WO/2015/158180A1 |
A medical diagnostic high-frequency X-ray machine and a power supply apparatus. The power supply apparatus can convert a mains alternating current into a direct current by adding alternating-current direct-current converters (121, 421, 5...
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WO/2015/146337A1 |
The X-ray high-voltage device is provided with a transformer, an inverter for converting a direct current voltage into an alternating current voltage, a rectification circuit for smoothing the alternating current voltage and supplying a ...
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WO/2015/145580A1 |
The present invention stably supplies a target. This target supply apparatus melts a target and supplies the target to the inside of a chamber, said target generating extreme ultraviolet light when irradiated with laser light in the cham...
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WO/2015/145668A1 |
An X-ray generation device in which an electron beam emitted from a cathode reaches a target, whereby X-rays are released, wherein the X-ray generation device has first and second high-voltage power supplies that are serially connected b...
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WO/2015/142926A1 |
Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to genera...
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WO/2015/139900A1 |
A fuel emitter, comprising a first droplet stream generator and a droplet removal apparatus. The first droplet stream generator is arranged to emit a fuel stream comprising droplets separated by a first distance. The droplet removal appa...
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WO/2015/128297A1 |
A system for an extreme ultraviolet (EUV) light source includes an optical amplifier (206) including a gain medium (207) positioned on a beam path, the optical amplifier configured to receive a light beam at an input and to emit an outpu...
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WO/2015/124714A1 |
The invention relates to a detection device for detecting a propagation direction of an optical beam. The detection device comprises a detector, which can be irradiated with the optical beam. The detection device comprises a focusing opt...
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WO/2015/124372A2 |
A lithographic system comprising a lithographic apparatus with an anamorphic projection system, and a radiation source configured to generate an EUV radiation emitting plasma at a plasma formation location, the EUV radiation emitting pla...
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WO/2015/120889A1 |
The invention relates to a device (20) for protecting a vacuum environment against leakage, comprising: an optical component (21) for closing off the vacuum environment in a gas-tight manner, a cooling device (25) for cooling the optical...
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WO/2015/121714A1 |
The invention discloses an integrated device for carrying out mammography, tomosynthesis and stereotactic biopsy of patient's breast in sitting, standing and lying down position. The patient's breast is positioned on the detector and x-r...
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WO/2015/118862A1 |
Disclosed are a foil trap and a light source device that minimizes warping of a foil and reductions in the EUV transmittance of a foil trap caused by an increase in the size of the foil trap and lengthening of the foil. A truncated conic...
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WO/2015/114174A1 |
The invention relates to a high-voltage, high-frequency, high-power transformer which includes a core (1) on which the primary winding (2) is arranged, on which a secondary winding (4) is arranged in an insulated manner, the entire assem...
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WO/2015/111512A1 |
A data processing unit (11) provided with a frequency analyzer (21) for performing vibration frequency analysis, a noise level calculator (23) for calculating the level of noise produced outside an X-ray tube, and a defect sign detector ...
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WO/2015/110238A1 |
A faceted reflector (32, 32") for receiving an incident radiation beam (2) and directing a reflected radiation beam at a target. The faceted reflector comprises a plurality of facets, each of the plurality of facets comprising a reflecti...
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WO/2015/110380A1 |
A target material is provided at a target location, the target material including a material that emits extreme ultraviolet light when converted to plasma, and the target material extending in a first extent along a first direction and i...
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