Title:
粒子ビームシステム製造方法及び製造装置
Document Type and Number:
Japanese Patent JP2006517715
Kind Code:
A
Abstract:
A method for producing corpuscular radiation systems (10-10, 12-12) in which a first corpuscular radiation system is formed on a first substrate (14) using corpuscular radiation induced deposition. The first corpuscular radiation system is then used to produce at least a second corpuscular radiation system on a second substrate (16) using computer controlled corpuscular radiation induced deposition using the first corpuscular radiation system. An Independent claim is made for a device for manufacture of corpuscular radiation systems.
Inventors:
Hans Wilfleet Peter Corps
Application Number:
JP2006500008A
Publication Date:
July 27, 2006
Filing Date:
January 23, 2004
Export Citation:
Assignee:
Navotech Game Beher
International Classes:
H01J9/02; B82B1/00; B82B3/00; H01J1/304; H01J37/317
Foreign References:
| DE19609234C | ||||
| DE4435043C | ||||
| DE19609234A1 | 1997-09-11 | |||
| DE4435043A1 | 1996-04-04 |
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro