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Document Type and Number:
Japanese Patent JP2007308760
Kind Code:
A5
More Like This:
WO/2000/068455COMPOSITE COATINGS
WO/2006/109562APPARATUS FOR FILM FORMATION AND METHOD FOR FILM FORMATION
WO/1995/017533MATERIAL OF CHEMICAL COMPOUNDS WITH A METAL IN GROUP IV A OF THE PERIODIC SYSTEM, NITROGEN AND OXYGEN AND PROCESS FOR PRODUCING IT
Application Number:
JP2006139017
Publication Date:
April 16, 2009
Export Citation:
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International Classes:
C23C14/24; G21K4/00; C23C14/06; C09K11/61



 
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