Title:
OLEDを製造するためのペレットを使用する蒸着源
Document Type and Number:
Japanese Patent JP2007507601
Kind Code:
A
Abstract:
A thermal physical vapor deposition source for vaporizing compacted pellets of organic materials onto a surface of a substrate in forming a display, including a housing defining a plurality of spaced passages each for receiving compacted pellets, a cover plate over the housing, with a first plurality of openings corresponding to the spaced passages of the housing and an electrical heater structure disposed over the cover plate. The thermal physical vapor deposition source further including an aperture plate, disposed over the electrical heater structure, an electrically insulating spacer member located between the electrical heater structure and an aperture plate, and circuitry for applying current to the electrical heater structure to produce heat sufficient to vaporize the pellets and permit vapor efflux of materials to pass through the cover plate, the heater structure, the electrically insulating spacer member and the aperture plate, onto the substrate.
Inventors:
Krug, Justin Hager
Gosh, Shamal Kumar
Carlton, Don Barton
Gosh, Shamal Kumar
Carlton, Don Barton
Application Number:
JP2006521090A
Publication Date:
March 29, 2007
Filing Date:
July 06, 2004
Export Citation:
Assignee:
Eastman Kodak Company
International Classes:
C23C14/24; C23C14/00; C23C14/12; C23C14/26; C23C16/00; H01L51/00; H01L51/50; H05B33/10; H01L51/56
Domestic Patent References:
| JPH0539565A | 1993-02-19 | |||
| JPH06116717A | 1994-04-26 | |||
| JP2003115381A | 2003-04-18 | |||
| JPH0539565A | 1993-02-19 | |||
| JPH06116717A | 1994-04-26 | |||
| JP2003115381A | 2003-04-18 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Satoshi Deno
Masaya Nishiyama
Takashi Ishida
Tetsuji Koga
Satoshi Deno
Masaya Nishiyama