Title:
TAPE EXPANDING DEVICE
Document Type and Number:
Japanese Patent JP2019220558
Kind Code:
A
Abstract:
To provide a tape expanding device that is able to appropriately divide a work piece.SOLUTION: A tape expanding device that expands expandable tape in a frame unit on which a work piece is supported in an annular frame via the expandable tape, comprises: a frame holding portion that holds the annular frame; a chuck table surrounded by the frame holding portion and having a holding surface for holding the work piece via the expandable tape; and a position adjustment unit that adjusts a position of the work piece with respect to the holding surface. The position adjustment unit comprises: a position detection unit that detects the position of the work piece temporarily placed in a temporarily placing area and held by the holding surface; and a position control unit comprising: an abutting portion that is brought into contact with an outer peripheral portion of the annular frame of the frame unit held by the frame holding portion; and a moving mechanism that moves the abutting portion according to the position of the work piece detected by the position detection unit.SELECTED DRAWING: Figure 1
Inventors:
HATTORI ATSUSHI
Application Number:
JP2018116261A
Publication Date:
December 26, 2019
Filing Date:
June 19, 2018
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; H01L21/683
Domestic Patent References:
| JP2018067668A | 2018-04-26 | |||
| JP2011077482A | 2011-04-14 | |||
| JP2010034250A | 2010-02-12 | |||
| JPH07211766A | 1995-08-11 | |||
| JPH07306153A | 1995-11-21 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro