Title:
HOLDING DEVICE
Document Type and Number:
Japanese Patent JP2020027914
Kind Code:
A
Abstract:
To effectively protect a joint from a plasma present around a holding device.SOLUTION: A holding device includes a plate-like member, a base member having a coefficient of thermal expansion different from a coefficient of thermal expansion of the plate-like member, and a joint that joins the plate-like member and the base member, and holds an object on the surface of the plate-like member. The holding device includes a first protection member that covers a side surface of the joint. The first protection member is a first nonwoven fabric made of inorganic fibers, and bonded to the side surface of the joint.SELECTED DRAWING: Figure 4
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Inventors:
SUZUKI ATSUSHI
Application Number:
JP2018153337A
Publication Date:
February 20, 2020
Filing Date:
August 17, 2018
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
H01L21/683; D04H1/4209; H01L21/205; H01L21/31
Domestic Patent References:
| JP2000114358A | 2000-04-21 | |||
| JP2001338970A | 2001-12-07 | |||
| JP2011508419A | 2011-03-10 | |||
| JPH0917849A | 1997-01-17 |
Attorney, Agent or Firm:
Patent Business Corporation Alpha International Patent Office