Title:
PRIMARY LINE SCANNING DEVICE AND SIGNAL PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2020047469
Kind Code:
A
Abstract:
To provide a primary line scanning device capable of obtaining data with a bit depth greater than the resolution of an A/D converter.SOLUTION: A primary line scanning device (electron microscope 100) capable of controlling a scanning speed of a primary line for scanning a sample S includes a detector 40 that detects a signal obtained by irradiating the sample S with a primary line and outputs an analog signal, an A/D converter 63 that samples the analog signal and converts the analog signal to a digital signal, and an arithmetic unit (digital filter 64) that averages digital signals.SELECTED DRAWING: Figure 2
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Inventors:
MATSUBARA TAKANORI
Application Number:
JP2018174946A
Publication Date:
March 26, 2020
Filing Date:
September 19, 2018
Export Citation:
Assignee:
JEOL LTD
International Classes:
H01J37/22; G01N23/2251; H01J37/147; H01J37/28
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi