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Title:
VACUUM CHUCK AND JOINT DEVICE
Document Type and Number:
Japanese Patent JP2021086989
Kind Code:
A
Abstract:
To provide a technique capable of suppressing distortion to a substrate.SOLUTION: A vacuum chuck includes a first plate which forms a suction chamber for sucking the substrate in a space to the substrate and a rib partitioning the suction chamber into a plurality of rooms. The rib includes a mesh-like front end face in contact with the substrate.SELECTED DRAWING: Figure 12

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Inventors:
SUGIHARA SHINTARO
Application Number:
JP2019217117A
Publication Date:
June 03, 2021
Filing Date:
November 29, 2019
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/02; H01L21/683
Domestic Patent References:
JP2019514197A2019-05-30
JPH06244269A1994-09-02
JP2001127144A2001-05-11
JP2005228829A2005-08-25
JP2019096864A2019-06-20
JPH10242255A1998-09-11
Foreign References:
WO2016068050A12016-05-06
WO2019142708A12019-07-25
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito



 
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