Title:
PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2021170598
Kind Code:
A
Abstract:
To provide a processing device capable of easily checking its operation status.SOLUTION: A processing device comprises a holding table which holds a workpiece, a processing unit which processes the workpiece held by the holding table, a display unit which displays an operation screen, an input unit, and a control unit. The control unit includes a function to switch display of the display unit from the operation screen to a display screen which displays an operation status when information is not input to the input unit for a certain period of time, and a function to switch display of the display unit from the display screen to the operation screen when information is input to the input unit with the display screen displayed in the display unit.SELECTED DRAWING: Figure 4
Inventors:
HIDAKA HIROKI
HIRATA KANAE
NEGISHI KATSUHARU
HIRATA KANAE
NEGISHI KATSUHARU
Application Number:
JP2020073241A
Publication Date:
October 28, 2021
Filing Date:
April 16, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B23Q17/00; G05B19/18; G05B19/409; G05B19/418
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Ei Okamoto
Takayuki Okano
Tomohiro Okamoto
Kasahara Takahiro
Ei Okamoto
Takayuki Okano