Title:
【発明の名称】イオン感応電界効果トランジスターおよびその製法
Document Type and Number:
Japanese Patent JP2564319
Kind Code:
B2
Abstract:
The invention relates to a process for manufacturing a REFET and/or CHEMFET, comprising: a) covalent bonding of a hydrophilic polymer layer to an isolator layer applied to a semiconductor material; b) the absorption of water or a watery solution into said hydrophilic polymer layer; and c) the binding of a hydrophobic polymer layer to the water holding hydrophilic polymer layer. It is advantageous that this water holding hydrophilic polymer layer also contains an electrolyte and/or a buffer. Preferably an ion to be measured with the CHEMFET also forms part of the electrolyte.
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Inventors:
SADOHERUTERU ERUNSUTO YAN ROBERUTO
SUKAURONSUKAAPUTASHINSUKA MARIA DANUTA
FUAN DERU UERU PEETERU DAUE
FUAN DEN BERUKU ARUBERUTO
REINHAUTO DEBITSUTO NIKORAASU
SUKAURONSUKAAPUTASHINSUKA MARIA DANUTA
FUAN DERU UERU PEETERU DAUE
FUAN DEN BERUKU ARUBERUTO
REINHAUTO DEBITSUTO NIKORAASU
Application Number:
JP22287487A
Publication Date:
December 18, 1996
Filing Date:
September 04, 1987
Export Citation:
Assignee:
PURIFUA AGURO HOORUDEINGU BV
International Classes:
G01N27/00; G01N27/30; G01N27/414; H01L29/78; (IPC1-7): G01N27/414; H01L29/78
Attorney, Agent or Firm:
Aoyama Ryo (1 person outside)