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Patent Searching and Data


Title:
【発明の名称】窒化ホウ素を用いた電子装置の作製方法
Document Type and Number:
Japanese Patent JP2813990
Kind Code:
B2
Inventors:
山崎 舜平
伊藤 健二
角野 真也
広瀬 直樹
Application Number:
JP21180089A
Publication Date:
October 22, 1998
Filing Date:
August 17, 1989
Export Citation:
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Assignee:
株式会社半導体エネルギー研究所
International Classes:
C30B29/38; C30B31/22; C30B33/02; H01L21/00; H01L21/205; H01L21/265; H01L21/268; H01L21/425; H01L21/428; H01L33/10; H01L33/16; H01L33/30; H01L33/34; H01L33/42; H01L33/62; (IPC1-7): H01L21/265; C30B29/38; C30B31/22; C30B33/02; H01L21/205; H01L33/00