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Title:
【発明の名称】紫外光用合成石英ガラス光学体の改質方法及び紫外光用合成石英ガラス光学体
Document Type and Number:
Japanese Patent JP2864414
Kind Code:
B2
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Inventors:
Fujiwara Seishi
Hiroki Jimbo
Norio Komine
Hiroyuki Hiraiwa
Application Number:
JP21197793A
Publication Date:
March 03, 1999
Filing Date:
August 26, 1993
Export Citation:
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Assignee:
NIKON CORPORATION
International Classes:
C03B20/00; C03B32/00; G03F7/20; (IPC1-7): C03B20/00



 
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