Title:
【発明の名称】複合部材の製造方法
Document Type and Number:
Japanese Patent JP2915555
Kind Code:
B2
Abstract:
A composite member includes a structural member having a surface in a mirror-finished condition and a film layer of an amorphous material provided on the surface. The amorphous material is preferably at least one selected from amorphous SiC, amorphous SiN, amorphous SiGe and amorphous GeN. In producing the composite member, a surface of a structural member is polished into a mirror-finished condition which is a finish condition by the usual mirror-finishing. The film layer of the amorphous material is then provided on the surface in the mirror-finished condition by plasma CVD process.
Inventors:
IMANISHI JUICHIRO
OOSHIMA MASATSUGU
OOSHIMA MASATSUGU
Application Number:
JP31406190A
Publication Date:
July 05, 1999
Filing Date:
November 21, 1990
Export Citation:
Assignee:
NIPPON GAISHI KK
International Classes:
C23C16/02; C23C16/30; C23C16/32; C23C16/34; C23C16/42; C23C16/509; C23C16/22; (IPC1-7): C23C16/30; C23C16/02; C23C16/34; C23C16/42
Domestic Patent References:
| JP58179940A |
Attorney, Agent or Firm:
Akihide Sugimura (13 others)