Title:
【発明の名称】バリアハイト測定装置
Document Type and Number:
Japanese Patent JP2915554
Kind Code:
B2
Abstract:
A barrier height measuring apparatus includes a conductive cantilever with a probe which is placed close to a specimen. The cantilever is elastically deformed by the interatomic force existing between the cantilever and specimen while the cantilever is oscillated. The displacement of the cantilever against the specimen is detected while the distance between the probe and the specimen is controlled to maintain the oscillation amplitude of the cantilever to a constant level. The apparatus includes a bias source for applying a voltage of a predetermined waveform between the specimen and the cantilever to cause a tunneling current to flow between them, and an arithmetic processor for calculating the barrier height of the surface of the specimen from the tunnel current and the displacement of the cantilever.
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Inventors:
YAGI AKIRA
Application Number:
JP31338990A
Publication Date:
July 05, 1999
Filing Date:
November 19, 1990
Export Citation:
Assignee:
ORINPASU KOGAKU KOGYO KK
International Classes:
G01B7/34; G01B21/30; G01N37/00; G01Q30/04; G01Q60/04; G01Q60/10; G01Q60/32; H01J37/28; (IPC1-7): G01B7/34; G01B21/30; G01N37/00; H01J37/28
Domestic Patent References:
| JP238905A | ||||
| JP2147803A | ||||
| JP4162340A | ||||
| JP312503A |