Title:
【発明の名称】プラズマ発生装置
Document Type and Number:
Japanese Patent JP2937468
Kind Code:
B2
Inventors:
TSUBOI HIDEO
TAKAGI KENICHI
HOSHINO AKIRA
TAKAGI KENICHI
HOSHINO AKIRA
Application Number:
JP31344490A
Publication Date:
August 23, 1999
Filing Date:
November 19, 1990
Export Citation:
Assignee:
NIPPON SHINKU GIJUTSU KK
International Classes:
H05H1/46; (IPC1-7): H05H1/46
Domestic Patent References:
| JP61284043A | ||||
| JP6235500A |
Attorney, Agent or Firm:
Yasuo Iisaka