Title:
【考案の名称】プロービングカード
Document Type and Number:
Japanese Patent JP3048842
Kind Code:
U
Inventors:
Hiroshi Marumoshi
Application Number:
JP1058597U
Publication Date:
May 29, 1998
Filing Date:
November 13, 1997
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
(IPC1-7): G01R1/073; H01L21/66
Attorney, Agent or Firm:
Hajime Ohara