【発明の名称】クリーニング方法 - 東京エレクトロン株式会社

Title:

【発明の名称】クリーニング方法

Document Type and Number:

Japanese Patent JP3058909

Kind Code:

B2

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Inventors:

Reiji Niino
Yasuo Imamura
View Yuichi
Shinji Miyazaki
Takahiko Moriya
Katsuya Okumura

Application Number:

JP28079290A

Publication Date:

July 04, 2000

Filing Date:

October 19, 1990

Export Citation:

Assignee:

東京エレクトロン株式会社
株式会社東芝

International Classes:

H01L21/31; H01L21/304; (IPC1-7): H01L21/31; H01L21/304

Domestic Patent References:

Attorney, Agent or Firm:

Saichi Suyama (1 person outside)

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