Title:
【発明の名称】イオン源
Document Type and Number:
Japanese Patent JP3086690
Kind Code:
B2
Abstract:
PURPOSE:To uniformly expand the high-density plasma generated in a chamber with a small cross section area into a chamber with a large cross section area by communicating the chamber with a small cross section area having the magnetic field in the axial direction and the multi-pole magnetic field on the outer periphery and the chamber with a large cross section area having only the multi-pole magnetic field on the outer periphery to form a plasma chamber. CONSTITUTION:A plasma chamber 11 is formed with a chamber 11a with a small cross section area and a chamber 11b with a large cross section area communicated to each other. An electromagnet 3 is arranged on the outer periphery of the chamber 11a with a small cross section area of the plasma chamber 11, and the magnetic field by the electromagnet 3 is formed in the axial direction of the chamber 11a with a small cross section area. The high- density plasma generated in the chamber 11a with a small cross section area of the plasma chamber 11 is uniformly diffused into the chamber 11b with a large cross section area by the axially diverging magnetic field generated by a magnetic flux absorber 13 and density diffusion, and uniform plasma with a large cross section area is obtained. Ions in plasma are extracted by an extracting electrode 4.
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Inventors:
Kenichi Takagi
Hideo Tsuboi
Akira Hoshino
Nobuyuki Inoue
Hitoshi Nihei
Junji Morikawa
Hideo Tsuboi
Akira Hoshino
Nobuyuki Inoue
Hitoshi Nihei
Junji Morikawa
Application Number:
JP8235890A
Publication Date:
September 11, 2000
Filing Date:
March 29, 1990
Export Citation:
Assignee:
Nippon Vacuum Technology Co., Ltd.
International Classes:
G01R33/64; G01N24/14; H01J27/18; H01J37/08; H01J49/10; H05H1/46; H05H7/08; (IPC1-7): H01J27/18; H01J37/08
Domestic Patent References:
| JP6280950A | ||||
| JP539993A | ||||
| JP63228549A | ||||
| JP63170832A | ||||
| JP63257166A |
Attorney, Agent or Firm:
Shigeru Yagita (3 outside)