Title:
【発明の名称】磁電管スパッタリング標的の性能を向上させる方法
Document Type and Number:
Japanese Patent JP3315113
Kind Code:
B2
Inventors:
Harwit, Stephen Dee.
Aronson, Arnold Jay.
Van, nut, charles
Aronson, Arnold Jay.
Van, nut, charles
Application Number:
JP51512291A
Publication Date:
August 19, 2002
Filing Date:
August 22, 1991
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C14/34; C23C14/35; H01J37/34; (IPC1-7): C23C14/35; H01J37/34
Domestic Patent References:
| JP6217174A | ||||
| JP1272765A | ||||
| JP60255974A |
Attorney, Agent or Firm:
Akira Asamura (3 outside)