Title:
【発明の名称】高純度アルゴンの分離方法及びその装置
Document Type and Number:
Japanese Patent JP3364724
Kind Code:
B2
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Inventors:
Atsushi Inoue
Osamu Utada
Osamu Utada
Application Number:
JP16176893A
Publication Date:
January 08, 2003
Filing Date:
June 30, 1993
Export Citation:
Assignee:
Nippon Oxygen Co., Ltd.
International Classes:
B01J19/14; C01G23/00; F25J3/04; (IPC1-7): F25J3/04; B01J19/14; C01G23/00
Attorney, Agent or Firm:
Kazuhiko Kido (1 person outside)