【発明の名称】荷電粒子照射装置 - Nippon Telegraph and Telephone Corporation

Title:

【発明の名称】荷電粒子照射装置

Document Type and Number:

Japanese Patent JP3369379

Kind Code:

B2

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Inventors:

Kenichi Saito

Application Number:

JP29797695A

Publication Date:

January 20, 2003

Filing Date:

November 16, 1995

Export Citation:

Assignee:

Nippon Telegraph and Telephone Corporation

International Classes:

H01J37/305; H01L21/027; (IPC1-7): H01J37/305; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Yoshihiko Izumi (1 person outside)

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