Title:
真空ポンプの排気方法
Document Type and Number:
Japanese Patent JP3377224
Kind Code:
B2
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Inventors:
Tetsuyuki Konishi
Yuji Naruse
Yuji Naruse
Application Number:
JP7714392A
Publication Date:
February 17, 2003
Filing Date:
March 31, 1992
Export Citation:
Assignee:
日本原子力研究所
International Classes:
F04B37/06; F04B37/08; F04D19/04; (IPC1-7): F04D19/04
Attorney, Agent or Firm:
Toshio Nishizawa