Title:
電子ビーム冷却装置
Document Type and Number:
Japanese Patent JP3559659
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a compact electron beam cooling device having a narrow range for ion beam movement by simultaneously using a superconductive solenoid coil and a water-cooled solenoid coil for an electron bean emitting device and by generating an electron beam having narrow range of movement. SOLUTION: In an electron beam cooling device of he present invention as claimed in Claim 1, a supereconductive solenoid coil 32 is interposed at the electron gun 2 and accelerating tube 3 part of an electron beam emitting device 17. A water-cooled solenoid coil 36 is provided between the superconducitve solenoid coil 32 and a toroidal coil 6 at an emitting side. The entire solenoid coil is covered by a continuos magnetic shield 31. A water-cooled solenoid coil magnetic body 33 in the magnetic shield 31 forms the boundary between the water-cooled solenoid coil magnetic body 33 and a superconductive solenoid magnetic body 32 having a diameter small than the inside diameter of the superconductive solenoid coil magnetic body 32. A vacuum exhaust boat 19, etc., of a supercondcutive cryostat 21 is interposed at the opposite end of the water-cooled solenoid coil 36.
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Inventors:
Masayuki Hoshino
Ken Yoshiyuki
Ken Yoshiyuki
Application Number:
JP28830296A
Publication Date:
September 02, 2004
Filing Date:
October 30, 1996
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G21K1/093; H01L39/04; H05H7/04; H05H13/04; (IPC1-7): H05H13/04; G21K1/093; H01L39/04; H05H7/04
Domestic Patent References:
| JP4073988A | ||||
| JP5145274A | ||||
| JP6077049A | ||||
| JP6089797A | ||||
| JP62022400A | ||||
| JP64007500A |
Attorney, Agent or Firm:
Yoshiaki Inomata