放電ガス処理方法 - Nissin Electric Co., Ltd.

Title:

放電ガス処理方法

Document Type and Number:

Japanese Patent JP3582379

Kind Code:

B2

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Inventors:

Kenta Naito
Takuya Kuwahara
Hitoshi Shibano
Shigeru Kato
Kawakita Yu

Application Number:

JP30810098A

Publication Date:

October 27, 2004

Filing Date:

October 29, 1998

Export Citation:

Assignee:

Nissin Electric Co., Ltd.

International Classes:

B01D53/34; B01D53/32; B01D53/52; B01D53/94; (IPC1-7): B01D53/32; B01D53/34; B01D53/52; B01D53/94

Domestic Patent References:

Attorney, Agent or Firm:

Keiji Yamamoto

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