Title:
磁気検出素子及びその製造方法
Document Type and Number:
Japanese Patent JP3587792
Kind Code:
B2
Abstract:
An insulation barrier layer is formed using an insulating material expressed by a composition formula of Al-Si-O or Si-O-N. The insulation barrier layer is therefore able to have improved dielectric strength, developer resistance, smoothness, and heat radiation.
Inventors:
Yasuo Hayakawa
Application Number:
JP2001074128A
Publication Date:
November 10, 2004
Filing Date:
March 15, 2001
Export Citation:
Assignee:
ALPS ELECTRIC CO.,LTD.
International Classes:
G01R33/09; G11B5/39; H01F10/30; H01F10/32; H01L43/08; H01L43/12; G11B5/31; G11B5/40; (IPC1-7): H01L43/08; G01R33/09; G11B5/39; H01F10/30; H01F10/32; H01L43/12
Domestic Patent References:
| JP2002190632A | ||||
| JP2002319722A | ||||
| JP2002208683A | ||||
| JP2001052316A | ||||
| JP2000332317A | ||||
| JP2002333468A |
Attorney, Agent or Firm:
野▲崎▼ 照夫