Title:
加熱処理装置のターンテーブル駆動機構
Document Type and Number:
Japanese Patent JP3615242
Kind Code:
B2
Inventors:
Akio Ueoka
Hiroshi Matsuo
Hiroshi Matsuo
Application Number:
JP21096194A
Publication Date:
February 02, 2005
Filing Date:
September 05, 1994
Export Citation:
Assignee:
Fuji Mac Co., Ltd.
International Classes:
H05B6/78; F24C15/16; (IPC1-7): H05B6/78; F24C15/16
Domestic Patent References:
| JP3020531A | ||||
| JP55051123A |
Attorney, Agent or Firm:
Minoru Nakamura
Fumiaki Otsuka
Shishido Kaichi
Hideto Takeuchi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Fumiaki Otsuka
Shishido Kaichi
Hideto Takeuchi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo