プラズマ処理装置およびプラズマ処理方法

Title:

プラズマ処理装置およびプラズマ処理方法

Document Type and Number:

Japanese Patent JP3980314

Kind Code:

B2

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Inventors:

Morita Haruki
Kenji Wada
Takashi Inamasu

Application Number:

JP2001305232A

Publication Date:

September 26, 2007

Filing Date:

October 01, 2001

Export Citation:

Assignee:

Sharp Corporation

International Classes:

H01L21/205; H05H1/46; C23C16/505; H01L21/302; H01L21/3065

Domestic Patent References:

Attorney, Agent or Firm:

Kuro Fukami

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