Title:
基板研磨方法及び基板研磨装置
Document Type and Number:
Japanese Patent JP3987305
Kind Code:
B2
Inventors:
Norio Kimura
Yu Ishii
Hirokuni Hiyama
Katsuya Okumura
Hiroyuki Yano
Yu Ishii
Hirokuni Hiyama
Katsuya Okumura
Hiroyuki Yano
Application Number:
JP2001204658A
Publication Date:
October 10, 2007
Filing Date:
July 05, 2001
Export Citation:
Assignee:
Ebara Corporation
Toshiba Corporation
Toshiba Corporation
International Classes:
B24B49/10; H01L21/304; B24B37/005; B24B37/013; B24B37/10; B24B49/12
Domestic Patent References:
| JP10058308A | ||||
| JP2257628A | ||||
| JP7251371A | ||||
| JP11111657A | ||||
| JP9036072A | ||||
| JP6198562A | ||||
| JP1268032A | ||||
| JP2000317825A | ||||
| JP11198033A |
Attorney, Agent or Firm:
Takashi Kumagai
Yu Takagi
Yu Takagi