Title:
炭化珪素半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4016954
Kind Code:
B2
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Inventors:
Keiko Fujihira
Kenichi Otsuka
Yoichiro Tarui
Masayuki Imaizumi
Tetsuya Takami
Kenichi Otsuka
Yoichiro Tarui
Masayuki Imaizumi
Tetsuya Takami
Application Number:
JP2004026899A
Publication Date:
December 05, 2007
Filing Date:
February 03, 2004
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L21/318; H01L29/12; H01L21/336; H01L29/78
Domestic Patent References:
| JP11274487A |
Attorney, Agent or Firm:
Shogo Takahashi
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka