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Title:
反射防止膜形成用組成物および反射防止膜
Document Type and Number:
Japanese Patent JP4120599
Kind Code:
B2
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Inventors:
Keiji Konno
Nomura Nakatsutsu
Hikaru Sugita
Masato Tanaka
Tsutomu Shimokawa
Application Number:
JP2004051548A
Publication Date:
July 16, 2008
Filing Date:
February 26, 2004
Export Citation:
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Assignee:
JSR CORPORATION
International Classes:
G03F7/11; G03F7/004; H01L21/027
Domestic Patent References:
JP8283199A
JP8239209A
Attorney, Agent or Firm:
Shunichiro Suzuki
Koji Makimura
Chihata Takahata
Toru Suzuki



 
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