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Patent Searching and Data


Title:
UNDERLYING RESIST COMPOSITION, NOVEL COMPOUND USEFUL FOR THE COMPOSITION AND PATTERN FORMING METHOD USING THE COMPOSITION
Document Type and Number:
Japanese Patent JP2008152203
Kind Code:
A
Abstract:

To provide a composition capable of forming an underlying resist layer which excels in etching resistance and antireflection function and reduces scum on an upper layer for image formation, a novel compound added to the composition, and a pattern forming method using the composition.

The underlying resist composition comprises (A) a resin having at least one of an aromatic cyclic hydrocarbon structure and an alicyclic hydrocarbon structure, (B) a methylol phenol compound or a methylol melamine compound which has at least one or more of adamantane structure, is activated by an acid and reacts with the component (A) to form a crosslinked structure, and (C) a compound which is thermally decomposed to generate an acid. The novel compound is a methylol novel phenol compound which is useful for the composition, has at least one or more of adamantane structure, is activated by an acid and reacts with the component (A) to form a crosslinked structure. The pattern forming method uses the composition.


Inventors:
KANDA HIROMI
NISHIKAWA NAOYUKI
Application Number:
JP2006342810A
Publication Date:
July 03, 2008
Filing Date:
December 20, 2006
Export Citation:
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Assignee:
FUJIFILM CORP
International Classes:
G03F7/11; C07C39/17; G03F7/004; G03F7/038; G03F7/26; H01L21/027
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa