Title:
配線ショート箇所の検査方法及び検査装置
Document Type and Number:
Japanese Patent JP4290316
Kind Code:
B2
Abstract:
In a method for detecting a line-short between conductive layers, a potential (or temperature) distribution of the conductive layers is detected while applying a DC voltage thereto. The method is particularly applicable to interdigitated conductive layers. A potential distribution across a wide range perpendicular to the conductors is detected to determine a first location of the line short. Potential distributions between conductors at points parallel to the conductors near the first location are then examined to determine a second location where the potential between the conductors is minimal. Potential distribution at points along a conductor are then examined to determine a location where the potential is sharply changed.
Inventors:
Hiromasa Kikuchi
Application Number:
JP2000139128A
Publication Date:
July 01, 2009
Filing Date:
May 11, 2000
Export Citation:
Assignee:
NEC Electronics Corporation
International Classes:
G01Q60/24; G01R31/26; G01Q60/30; G01R31/302; G01R1/06; G01R31/02; G01R31/28; G01R31/308
Domestic Patent References:
| JP8105926A | ||||
| JP5312882A | ||||
| JP6207914A | ||||
| JP2000021945A | ||||
| JP10178075A | ||||
| JP5157820A | ||||
| JP9325079A |
Attorney, Agent or Firm:
Kimura Mitsuru