Title:
圧電体装置及びその製造方法
Document Type and Number:
Japanese Patent JP4357659
Kind Code:
B2
Abstract:
A piezoelectric device having improved characteristics is accomplished by restricting degradation and variance of vibration characteristics resulting from an adhesive, and a production process is simplified. The piezoelectric device has a construction in which a ultra-fine particle layer made of substantially the same main component and having the same crystal structure as those of a piezoelectric layer is formed on a substrate, and the piezoelectric layer is formed on the ultra-fine particle layer.
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Inventors:
Wakabayashi Mari
Masataka Shinogi
Toshihiko Sakuhara
Masataka Shinogi
Toshihiko Sakuhara
Application Number:
JP23734999A
Publication Date:
November 04, 2009
Filing Date:
August 24, 1999
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
H01L41/09; B81B3/00; B81C1/00; H01L41/187; H01L41/22; H01L41/313; H02N2/00
Domestic Patent References:
JP9298324A | ||||
JP6291387A | ||||
JP6119811A | ||||
JP7206600A | ||||
JP8230181A |
Attorney, Agent or Firm:
Yoshiharu Matsushita